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Multi-variable statistical process controller for discrete manufacturing 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06F-015/46
  • G05B-013/04
출원번호 US-0124083 (1993-09-20)
발명자 / 주소
  • Mozumder Purnendu K. (Plano TX) Saxena Sharad (Dallas TX) Pu William W. (Plano TX)
출원인 / 주소
  • Texas Instruments Incorporated (Dallas TX 02)
인용정보 피인용 횟수 : 133  인용 특허 : 0

초록 ▼

A method and system for controlling a plurality of process control variables for processing discrete products is described. The method comprising: utilizing process models relating a plurality of product quality parameters to the plurality of process control variables; measuring the plurality of pro

대표청구항 ▼

A method of controlling a plurality of process control variables in semiconductor wafer processing, said method comprising: a. utilizing process models relating a plurality of product quality parameters to said plurality of process control variables; b. measuring said plurality of product quality pa

이 특허를 인용한 특허 (133)

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