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Piezoelectric actuator for optical alignment screws 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/08
출원번호 US-0043263 (1993-04-06)
발명자 / 주소
  • Luecke Francis S. (San Jose CA) Tuganov Alexander (Mountain View CA)
출원인 / 주소
  • New Focus, Inc. (Sunnyvale CA 02)
인용정보 피인용 횟수 : 58  인용 특허 : 0

초록

A piezoelectric actuator for rotating a shaft associated with an optical mount positioning system in which the actuator moves in first direction at a slow enough velocity to maintain engagement between the actuator and shaft to drive the shaft in the desired direction, and the actuator moves in a se

대표청구항

A piezoelectric driven actuator for rotation of a shaft positioned for rotational movement within a hole in a mount element, comprising: a. an actuator frame; b. said frame including a first, movable, jaw having a portion for engagement with the shaft to be driven, said frame further including a sec

이 특허를 인용한 특허 (58)

  1. Margeson,Christopher S., Acceleration clamp assist.
  2. Fathi, Saeed; Robson, Mark; Dhese, Keith, Amplified piezo actuator with motorized adjustment screw.
  3. Moler, Jeff; Bugel, John; Thornhill, Keith A; Oudshoorn, Mark P, Apparatus and process for optimizing work from a smart material actuator product.
  4. Moler,Jeff; Bugel,John; Thornhill,Keith A.; Oudshoorn,Mark P., Apparatus and process for optimizing work from a smart material actuator product.
  5. John Pease ; Sherwin D. Cabatic ; Dennis E. Melvin, Apparatus for controlling a piezoelectric assembly of a piezo actuator coupled with a driven member.
  6. Moler, Jeff, Apparatus for moving a pair of opposing surfaces in response to an electrical activation.
  7. Moler, Jeff, Apparatus for moving a pair of opposing surfaces in response to an electrical activation.
  8. Moler, Jeff, Apparatus for moving a pair of opposing surfaces in response to an electrical activation.
  9. Bugel, John Anthony; Moler, Jeff, Apparatus for moving folded-back arms having a pair of opposing surfaces in response to an electrical activation.
  10. Moler, Jeff; Oudshoorn, Mark; Akhavein, R. Glenn; Woozley, Mark; Alexy, Michael, Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator.
  11. Moler, Jeff; Oudshoorn, Mark; Akhavein, R. Glenn; Woozley, Mark; Alexy, Michael, Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator.
  12. Moler, Jeff; Oudshoorn, Mark; Akhavein, R. Glenn; Woozley, Mark; Alexy, Michael, Apparatus having a support structure and actuator.
  13. Tominaga Takayuki (Kariya JPX) Senda Kouji (Oobu JPX) Idogaki Takaharu (Okazaki JPX) Kaneko Takashi (Nagoya JPX) Kanayama Hitoshi (Nagoya JPX), Articulation device.
  14. Zeigler,Andrew; Arnone,David F.; Green,Evan Drake Harriman, Closed loop mover assembly with measurement system.
  15. Ziegler, Andrew; Arnone, David F.; Green, Evan Drake Harriman, Closed loop mover assembly with measurement system.
  16. Culpi, William, Compact versatile stick-slip piezoelectric motor.
  17. Okamoto,Yasuhiro, Driving apparatus.
  18. Yoshida Ryuichi,JPX ; Okamoto Yasuhiro,JPX ; Kuwana Minoru,JPX, Driving apparatus using transducer.
  19. Higuchi, Toshiro; Nabae, Hiroyuki; Takahashi, Koji, Electromagnetic actuator.
  20. Claeyssen, Frank; Barillot, Francois, Fine positioning system using an inertial motor based on a mechanical amplifier.
  21. Moler, Jeff; Bugel, John A., Folded back arm actuator.
  22. Moler, Jeff; Dickey, Aaron; Bugel, John A., Folded back arm actuator with enlarged central anvil.
  23. Tsai, Haiming, Hand truck.
  24. Cuerden,Brian; Angel,J. Roger P.; Burge,James H.; DeRigne,Scott T., Impact micro-positioning actuator.
  25. Karrai, Khaled; Haines, Miles, Inertial rotation device.
  26. Moler, Jeff; Bugel, John A., Integral actuator with folded back arms and hollowed out force transfer member.
  27. Bugel, John A.; Moler, Jeff, Integral actuator with folded-back arms.
  28. Moler, Jeff, Integral actuator with force transfer member.
  29. Moler, Jeff; Bugel, John A., Integral actuator with hollowed out force transfer member.
  30. Moler, Jeff, Integral force transfer member.
  31. Li, Hongqi, Integral preload mechanism for piezoelectric actuator.
  32. Li, Hongqi, Integrated picomotor mount.
  33. Munekata Mutsuo,JPX ; Matsuno Susumu,JPX ; Ono Shoichi,JPX ; Kawasaki Koji,JPX ; Uzawa Kokichi,JPX ; Kinugawa Hiroshi,JPX, Lever displacement enlarging mechanism.
  34. Oudshoorn, Mark; Moler, Jeff; Akhavein, R. Glenn; Woozley, Mark; Blatt, John, Linear motor having piezo actuators.
  35. Williams,Eric C.; Arnone,David F.; Sharma,Manish, Linear output, closed loop mover assembly.
  36. Soemers, Hermanus Mathias Joannes Rene; Peeters, Felix Godfried Peter, Lithographic apparatus and pivotable structure assembly.
  37. Henderson,David, Mechanism comprised of ultrasonic lead screw motor.
  38. Henderson,David; Guelzow,James; Hoffman,Conrad; Culhane,Robert, Mechanism comprised of ultrasonic lead screw motor.
  39. Henderson,David; Viggiano, III,Dan, Mechanism comprised of ultrasonic lead screw motor.
  40. Wings,Gerd; Hoffmann,Christian; Wulf,Klaus; Michaelsen,Carsten, Method and device for aligning an optical element.
  41. Mark Oudshoorn ; Jeff Moler ; R. Glenn Akhavein, Method and system for automatically tuning a stringed instrument.
  42. Green,Evan Drake Harriman, Multiple speed mover assembly.
  43. Thomas, Patrick J.; Gvero, Daniel; Desailly, Roger, Optical adjustable mounts with absolute position feedback.
  44. Thomas, Patrick J.; Gvero, Daniel; Desailly, Roger, Optical adjustable mounts with absolute position feedback.
  45. Thomas, Patrick; Desailly, Roger, Optical adjustment mounts with piezoelectric inertia driver.
  46. Min,Byoung Own; Jeon,Hyoung Jun; Kim,Hyun Jin, Piezoelectric actuator drive system.
  47. Witteveen,Bonny, Piezoelectric drive.
  48. Hübner, Reinhard; Marth, Harry, Piezoelectric rotary drive for a shaft.
  49. Oliver John R. ; Neurgaonkar Ramakar R. ; Nelson Jeffrey G. ; Bertolini Carlo,FRX, Rotary piezoelectric motor for vehicle applications.
  50. Okamoto Yasuhiro,JPX ; Tanijiri Yasushi,JPX, Rotary type driving device employing electromechanical transducer and apparatus provided with the rotary type driving device.
  51. Williams,Eric C; Arnone,David F., Sealed mover assembly.
  52. Cheng, Jack; Carruno, Christopher Damien, Smart sonic bearings and method for frictional force reduction and switching.
  53. Cheng, Jack; Carruno, Christopher Damien, Smart sonic bearings for frictional force reduction and switching.
  54. Cordingley, James J.; Plotkin, Michael; Keefe, John, System and method for automatic laser beam alignment.
  55. Hielscher, Harald; Hielscher, Thomas; Hielscher, Holger, Ultrasonic generator with a resonator having a clamping opening.
  56. Henderson, David A., Ultrasonic lead screw motor.
  57. Okazaki Mitsuhiro,JPX, Ultrasonic vibration motor and method for performing coarse and fine movements.
  58. Moler, Jeff, Uni-body piezoelectric motor.
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