[특허]Mass flow sensor

Mass flow sensor 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01F-001/68
출원번호	US-0227983 (1994-04-15)
우선권정보	JP-0057048 U (1991-06-13); JP-0181514 (1991-06-13); JP-0181515 (1991-06-13)
발명자 / 주소	Suzuki Isao (Tokyo JPX)
출원인 / 주소	MKS Japan, Inc. (Tokyo JPX 03)
인용정보	피인용 횟수 : 29 인용 특허 : 0

초록 ▼

A mass flow sensor is capable of accurately measuring a mass flow irrespective of changes in the ambient temperature. The mass flow sensor includes at least one heating resistor disposed on a portion of a sensor pipe through which a fluid to be measured flows and a housing for the sensor pipe. The heating resistor and a temperature sensitive resistance constitute a bridge circuit. The temperature sensitive resistance is disposed in the housing. The resistance of the sensor changes in accordance with the change in the temperature of the housing to thereby adjust the change in the resistance of the heating resistor. Further, an improved temperature sensitive matching resistor is suitably used in the mass flow sensor, in which a plurality of temperature sensitive resistances having equal characteristics are integrated.

대표청구항 ▼

A mass flow sensor comprising a first heating resistor and a second heating resistor disposed on the upstream side and the downstream side, respectively, of a fluid pipe with respect to the flow of a fluid within the fluid pipe, for detecting a mass flow thereof, characterized in that said mass flow sensor further comprises: a first bridge circuit having first and second bridge routes each defining separate current paths and including said first heating resistor in said first bridge route; a second bridge circuit having third and fourth bridge routes each defining separate current paths and including said second heating resistor in said third bridge route; a control circuit for supplying an electric current to each of said first and second bridge circuits so as to bring each of said first and second bridge circuits into a balanced state; and first and second temperature sensitive resistances which are responsive to ambient temperature changes and have equal temperature coefficients and which are respectively disposed in said second bridge route of said first bridge circuit and said fourth bridge route of said second bridge circuit; wherein said first and second heating resistors are disposed on a ceramic tube fitted over the fluid pipe and said first and second temperature sensitive resistances are formed of a tubular substrate having an inside diameter which is fitted over the fluid pipe, said first and second heating resistors and said tubular substrate being spaced apart along a length of said fluid pipe, and wherein said fluid pipe has a first branch pipe and a second branch pipe branched therefrom between an inlet and outlet of said fluid pipe, and said first and second heating resistors and said first and second temperature sensitive resistances are disposed around said first branch pipe and said second branch pipe, respectively.

이 특허를 인용한 특허 (29)

Shajii, Ali; Kottenstette, Nicholas; Ambrosina, Jesse, Apparatus and method for pressure fluctuation insensitive mass flow control.
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Shajii, Ali; Kottenstette, Nicholas; Ambrosina, Jesse, Apparatus and method for pressure fluctuation insensitive mass flow control.
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Shajii, Ali; Kottenstette, Nicholas; Ambrosnia, Jesse, Apparatus and method for pressure fluctuation insensitive mass flow control.
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Shajii,Ali; Kottenstette,Nicholas; Ambrosina,Jesse, Apparatus and method for pressure fluctuation insensitive mass flow control.
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Vu, Kim Ngoc, Extreme flow rate and/or high temperature fluid delivery substrates.
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Suzuki Shinichi,JPX, Flow measuring device and flow measuring method.
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Suzuki Shinichi,JPX, Flow measuring device and flow measuring method.
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Suzuki Isao,JPX, Flow rate sensor implementing a plurality of inner tubes located within a sensor tube.
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Suzuki,Isao, Flow rate sensor implementing a plurality of inner tubes located within a sensor tube.
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Tokuhisa, Yasukazu; Tanaka, Makoto, Flow rate sensor, flow rate measuring device, and flow rate control device.
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Vu, Kim Ngoc, Fluid delivery substrates for building removable standard fluid delivery sticks.
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Ritchart Thomas R., Fluid thermal mass flow sensor.
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Eric J. Redemann ; Kim N. Vu, Gas panel.
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Lukas Paul ; Gagnon Daniel F. ; Johnson Daniel ; Farrar Christopher D. ; Knight John D. ; Gillis John J., Line leak detection.
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Jarvie, Ian F., Line leak detector and method of using same.
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Jarvie, Ian F., Line leak detector and method of using same.
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Suzuki, Isao, Mass flow controller.
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McMillan Robert D. ; McMillan Robert M., Mass flow sensor system for fast temperature sensing responses.
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McMillan Robert D. ; McMillan Robert M., Mass flow sensor system for fast temperature sensing responses.
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Lull, John Michael; Urdaneta, Nelson, Method and apparatus for balancing resistance.
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Alvesteffer William J. ; Huang Yufeng ; Eget Larry, Method and apparatus for measuring a fluid.
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Smirnov, Alexei V.; Zolock, Michael J., Method and mass flow controller for enhanced operating range.
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McQueen Malcolm M. ; Kresch Sam, Thermal dispersion mass flow rate and liquid level switch/transmitter.
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McQueen, Malcolm M.; Kresch, Samuel; Rodriguez, Agustin J., Thermal dispersion mass flow rate and liquid level switch/transmitter.
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Smirnov, Alexei V., Thermal flow sensor with zero drift compensation.
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Yamakawa Tomoya,JPX ; Kawai Masahiro,JPX, Thermal-type flow sensor.
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Horiguchi Hiroyuki (Yokohama JPX) Nakayama Yoshinobu (Kawasaki JPX), Thermally-sensitive type flow meter having a high accuracy.
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Lull, John Michael, Variable resistance sensor with common reference leg.
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Lull,John Michael, Variable resistance sensor with common reference leg.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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Mass flow sensor 원문보기

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Mass flow sensor 원문보기

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이 특허를 인용한 특허 (29)

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