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Silicon-on-insulator CMOS device and a liquid crystal display with controlled base insulator thickness 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-027/01
  • H01L-027/13
출원번호 US-0274156 (1994-07-14)
우선권정보 JP-0040496 (1992-01-31)
발명자 / 주소
  • Inoue Shunsuke (Yokohama JPX) Koizumi Toru (Yokohama JPX) Miyawaki Mamoru (Tokyo JPX) Sugawa Shigetoshi (Atsugi JPX)
출원인 / 주소
  • Canon Kabushiki Kaisha (Tokyo JPX 03)
인용정보 피인용 횟수 : 110  인용 특허 : 0

초록

A semiconductor device has an NMOS transistor and a PMOS transistor formed on at least one monocrystal Si region formed in a thin-film Si layer formed on an insulation layer. The thickness TBOX of the insulation layer on which the NMOS and PMOS transistors are formed, the voltage VSS of a low-voltag

대표청구항

A semiconductor device comprising an insulation layer, a thin-film Si layer formed on said insulation layer and having at least one monocrystal Si region formed therein, and an NMOS transistor and a PMOS transistor formed on said at least one monocrystal Si region, wherein a thickness TBOX of said i

이 특허를 인용한 특허 (110)

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