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One atmosphere, uniform glow discharge plasma

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01J-007/24
출원번호 US-0145786 (1993-10-29)
발명자 / 주소
  • Roth John R. (Knoxville TN) Tsai Peter P. (Knoxville TN) Liu Chaoyu (Knoxville TN) Laroussi Mounir (Knoxville TN) Spence Paul D. (Knoxville TN)
출원인 / 주소
  • The University of Tennessee Research Corporation (Knoxville TN 02)
인용정보 피인용 횟수 : 115  인용 특허 : 0

초록 ▼

A steady-state, glow discharge plasma is generated at one atmosphere of pressure within the volume between a pair of insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. Space between the electrodes is occupied by air, nitrou

대표청구항 ▼

Apparatus to generate and maintain a glow discharge plasma at a pressure of about 1 atmosphere, the apparatus comprising a pair of electrically insulated electrodes aligned and secured in equidistant opposition, means for supplying and maintaining a glow discharge plasma sustaining gas at a pressure

이 특허를 인용한 특허 (115)

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