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Surface scanner with thin film gauge 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-021/88
출원번호 US-0095144 (1993-07-20)
발명자 / 주소
  • Gross Kenneth P. (San Carlos CA) Kren George J. (Los Altos Hills CA) Bevis Christopher F. (San Francisco CA)
출원인 / 주소
  • Tencor Instruments (Mountain View CA 02)
인용정보 피인용 횟수 : 117  인용 특허 : 0

초록 ▼

An optical surface scanner for semiconductor wafers and like substrates having one channel with a detector receiving collected scattered light and another channel with a detector receiving reflected light. The scattered light signal is indicative of surface haze, particle count and size, while the r

대표청구항 ▼

An apparatus for surface inspection comprising, a focused scanning beam illuminating a spot on a specularly reflective wafer having a film layer and light scattering elements thereon, means for providing relative motion between the beam and the wafer, a first detector positioned to intercept scatter

이 특허를 인용한 특허 (117)

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