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Integrated microvalve structures with monolithic microflow controller 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-031/02
출원번호 US-0098738 (1993-07-28)
발명자 / 주소
  • Wise Kensall D. (Ann Arbor MI) Robertson Janet K. (Ann Arbor MI) Ji Jin (White Plains NY)
출원인 / 주소
  • Regents of the University of Michigan (Ann Arbor MI 02)
인용정보 피인용 횟수 : 196  인용 특허 : 0

초록

Micromachined microvalves are held both open and closed electrostatically to maintain uniform gas microflow and improve closure characteristics. A microflow controller containing such a valve is combined with a predetermined restricted flow path. Multiple valve/restrictive flow path combinations are

대표청구항

A micromachined valve apparatus comprising: a valve unit substrate; a micromachined electrically conductive housing having a coefficient of expansion at least generally matching that of said substrate; one of said substrate and said housing having a recess therein; a bond between facing surfaces of

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