[특허]Multiple split-beam laser processing apparatus generating an array of focused beams

Multiple split-beam laser processing apparatus generating an array of focused beams 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G02B-006/32 B23K-026/00
출원번호	US-0141003 (1993-10-26)
우선권정보	JP-0288490 (1992-10-27); JP-0294828 (1992-11-04); JP-0116909 (1993-05-19); JP-0138191 (1993-06-10)
발명자 / 주소	Furuya Nobuaki (Kawasaki JPX) Oda Gen (Ebina JPX) Ichihashi Kouki (Kawasaki JPX)
출원인 / 주소	Matsushita Electric Industrial Co., Ltd. (Osaka JPX 03)
인용정보	피인용 횟수 : 53 인용 특허 : 0

초록 ▼

A laser processing apparatus includes a plurality of optical fibers formed into a bundle which is shaped such as to efficiently divide a laser beam into a plurality of split beams and transmit the split beams to respective converging lenses to be focused to have a high energy density when incident on respective workpieces. The optical fibers are shaped such as to each have a sufficiently large value of minimum radius of curvature to ensure that a small angle of divergence is maintained for each of the beams emitted from the fibers, thereby ensuring that the converging lenses can be small and inexpensive.

대표청구항 ▼

A laser processing apparatus comprising: a laser oscillator; a laser beam splitting and transmitting unit formed of a plurality of optical fibers arranged in a bundle, for splitting a laser beam emitted by said laser oscillator into a plurality of split laser beams and transmitting said split laser beams along respective ones of said optical fibers to respective emission ends of said optical fibers said optical fibers having respective incidence ends thereof disposed mutually closely together, positioned to receive said laser beam, and having said respective emission ends thereof spaced apart at regular intervals; a split laser beam condensing optical system including a plurality of converging lenses each positioned in relation to a corresponding one of said emission ends, for focusing said split laser beams to produce respective condensed split laser beams; workpiece support means for supporting a plurality of workpieces in relation to said split laser beam condensing optical system at respective positions for processing all of said workpieces simultaneously by respective ones of said condensed split laser beams; an original laser beam condensing optical system for condensing an original laser beam emitted by said laser oscillator, to form a condensed laser beam having a value of angle of divergence which is substantially unchanged from an angle of divergence of said original laser beam; and a beam scrambler formed of a transparent body having an elongated straight cylindrical shape, disposed between said original laser beam condensing optical system and said laser beam splitting and transmitting unit.

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Multiple split-beam laser processing apparatus generating an array of focused beams 원문보기

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Multiple split-beam laser processing apparatus generating an array of focused beams 원문보기

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