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Process for fabricating layered superlattice materials and making electronic devices including same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/385
출원번호 US-0065656 (1993-05-21)
발명자 / 주소
  • Watanabe Hitoshi (Tokyo CO JPX) Paz De Araujo Carlos A. (Colorado Springs CO) Yoshimori Hiroyuki (Kanagawa CO JPX) Scott Michael C. (Colorado Springs CO) Mihara Takashi (Saitama CO JPX) Cuchiaro Jose
출원인 / 주소
  • Symetrix Corporation (Colorado Springs CO 02) Olympus Optical Co., Ltd. (Tokyo JPX 03)
인용정보 피인용 횟수 : 68  인용 특허 : 0

초록

A liquid precursor containing a metal is applied to a substrate, RTP baked, and annealed to form a layered superlattice material. Prebaking the substrate and oxygen in the RTP and anneal is essential, except for high bismuth content precursors. Excess bismuth between 110% and 140% of stoichiometry a

대표청구항

A method of fabricating a layered superlattice material comprising the steps of: providing a substrate, and a precursor containing metal moieties in effective amounts for yielding said layered superlattice material from said precursor: applying said precursor to said substrate; and rapid thermal pro

이 특허를 인용한 특허 (68)

  1. Solayappan, Narayan; Celinska, Jolanta; Joshi, Vikram; Paz de Araujo, Carlos A.; McMillan, Larry D., Barrier layers for protecting metal oxides from hydrogen degradation.
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  5. Uchiyama, Kiyoshi; Solayappan, Narayan; Paz de Araujo, Carlos A., Chemical vapor deposition process for fabricating layered superlattice materials.
  6. Garza Mario ; Chao Keith K., Comparing aerial image to SEM of photoresist or substrate pattern for masking process characterization.
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  15. Paz de Araujo,Carlos A.; McMillan,Larry D.; Solayappan,Narayan; Joshi,Vikram, Ferroelectric and high dielectric constant integrated circuit capacitors with three-dimensional orientation for high-density memories, and method of making the same.
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  17. Paz de Araujo, Carlos A.; McMillan, Larry D.; Joshi, Vikram; Solayappan, Narayan; Cuchiaro, Joseph D., Ferroelectric and high dielectric constant transistors.
  18. Jung, Dong-jin, Ferroelectric capacitor and method for fabricating the same.
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  56. Uchiyama, Kiyoshi; Paz de Araujo, Carlos A.; Tanaka, Keisuke, Rapid-temperature pulsing anneal method at low temperature for fabricating layered superlattice materials and making electronic devices including same.
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  66. Azuma Masamichi ; McMillan Larry D. ; Paz de Araujo Carlos A. ; Scott Michael C., UV radiation process for making electronic devices having low-leakage-current and low-polarization fatigue.
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