[특허]Microstructure gas valve control forming method

Microstructure gas valve control forming method 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-021/306 B44C-001/22 C23F-001/00
출원번호	US-0230996 (1994-04-21)
발명자 / 주소	Bonne Ulrich (Hopkins MN) Ohnstein Thomas R. (Roseville MN)
출원인 / 주소	Honeywell Inc. (Minneapolis MN 02)
인용정보	피인용 횟수 : 143 인용 특허 : 0

초록 ▼

A process for fabricating a flow control device which includes a housing with separate main flow and flow control (servo) passages between an inlet port and an exit port. A control chamber in the housing is in fluid communication with the servo passage. A flexible membrane forms a partition between the main flow passage and the control chamber. The servo passage includes a variable servo orifice upstream of the control chamber and a fixed orifice downstream of the chamber. When the servo valve is open to permit passage of fluid into the control chamber, the resultant pressure on the membrane maintains the main valve closed. The main valve opens in response to closing the servo valve. The fixed orifice has a profile sufficiently small to provide for an acceptable leak or continuous fluid flow through the device when the servo valve is open, and further provides for a soft start when the servo valve is closed to open the main valve. The fixed orifice, servo valve including a servo valve orifice and electrostatically controlled closure tabs, and a microbridge flow sensing device, are advantageously formed on a monolithic semiconductor chip mounted inside the housing. Significantly, a dielectric layer is deposited on a portion of the substrate surface surrounding the orifice formed therein to form the mesa and subsequently other dielectric and conductive layers are deposited with etching.

대표청구항 ▼

A process for forming a microminiature valve, including the steps of: forming an orifice through a semiconductor substrate having a planar and lateral substrate surface; depositing a first dielectric thin film layer on a portion of the substrate surface surrounding the orifice to form a mesa; depositing a second dielectric thin film layer over the mesa and onto a portion of the substrate surface surrounding the mesa; depositing a first electrically conductive thin film onto the second dielectric layer to form a first electrode; depositing a third dielectric layer over the first electrode and onto portions of the second dielectric layer around the first electrode, to substantially encapsulate the first electrode; forming an opening through the first, second and third dielectric thin film layers at the orifice; forming a thin film sacrificial layer of a sacrificial material over a portion of the third dielectric thin film layer in a region surrounding the orifice; depositing a fourth dielectric thin film layer over the sacrificial layer and over a portion of the third dielectric thin film layer surrounding the sacrificial layer, said portion of the third dielectric thin film layer being laterally offset from and surrounding said first dielectric layer; depositing a second electrically conductive thin film on the fourth dielectric thin film layer to form a second electrode; depositing a fifth dielectric layer over the second electrode and on a portion of the fourth dielectric thin film layer around the second electrode, to substantially encapsulate the second electrode, thus to complete the formation of an intermediate semiconductor product including the substrate, dielectric layers, sacrificial layer and electrodes; heating the semiconductor product to a temperature of about 700 degrees C. to anneal the semiconductor product, thereby to create a residual tensile stress in the fourth and fifth dielectric thin film layers; and removing the sacrificial material by etching, to form a gap between the third dielectric thin film layer and the fourth dielectric thin film layer.

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Shyy, Wei; Francois, Marianne Monique; Chung, Jacob Nan-Chu, Thermal management device.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

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Microstructure gas valve control forming method 원문보기

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Microstructure gas valve control forming method 원문보기

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