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Programmable semiconductor wafer for sensing, recording and retrieving fabrication process conditions to which the wafer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/70
출원번호 US-0127941 (1993-09-28)
발명자 / 주소
  • Smesny Greg A. (Austin TX) Conboy Michael R. (Buda TX)
출원인 / 주소
  • Advanced Micro Devices, Inc. (Sunnyvale CA 02)
인용정보 피인용 횟수 : 111  인용 특허 : 0

초록 ▼

A semiconductor wafer is provided for sensing and recording processing conditions to which the wafer is exposed. The wafer can also write the recorded processing conditions to an external output device connectable to the wafer. The wafer includes a plurality of regions spaced across the wafer, and a

대표청구항 ▼

A semiconductor wafer for sensing and recording processing conditions to which the wafer is exposed, comprising: a semiconductor substrate having a plurality of regions spaced upon one surface of said substrate; at least one sensor lithography formed within each of said regions for producing during

이 특허를 인용한 특허 (111)

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