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Microbar sensor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-027/00
출원번호 US-0217411 (1994-03-24)
발명자 / 주소
  • Wachter Eric A. (Oak Ridge TN) Thundat Thomas G. (Knoxville TN)
출원인 / 주소
  • Martin Marietta Energy Systems, Inc. (Oak Ridge TN 02)
인용정보 피인용 횟수 : 135  인용 특허 : 0

초록 ▼

A mass microsensor is fabricated with a microcantilever oscillated by a piezoelectric transducer. A chemical coating having absorptive or adsorptive affinity for a specifically targeted chemical or compound is applied to the microcantilever for oscillation in the monitored atmosphere. Molecules of t

대표청구항 ▼

An apparatus for detecting the presence of a predetermined vapor phase chemical in a monitored atmosphere comprising: a piezoelectric transducer having a least one cantilevered spring element secured thereto, said spring element having an area thereof coated with a chemical having an affinity for sa

이 특허를 인용한 특허 (135)

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