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Use of vanadium oxide in microbolometer sensors 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-031/08
  • H01C-007/00
  • G02B-026/10
출원번호 US-0085243 (1993-06-29)
발명자 / 주소
  • Wood R. Andrew (Bloomington MN)
출원인 / 주소
  • Honeywell Inc. (Minneapolis MN 02)
인용정보 피인용 횟수 : 71  인용 특허 : 0

초록

In a microbolometer infrared radiation sensor, a detector material (VO2) having a high thermal coefficient of resistance to increase the sensitivity of the apparatus.

대표청구항

An infrared radiation detector comprising in combination: a semiconductor body having a depression formed in a first surface of the body; a thin film dielectric member attached to the first surface at least at one location and positioned to suspend the dielectric member as a thermally isolated struc

이 특허를 인용한 특허 (71)

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