[특허]Process for growing a film epitaxially upon an oxide surface and structures formed with the process

Process for growing a film epitaxially upon an oxide surface and structures formed with the process 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	C30B-023/02
출원번호	US-0163427 (1993-12-08)
발명자 / 주소	McKee Rodney A. (Kingston TN) Walker Frederick J. (Oak Ridge TN)
출원인 / 주소	Martin Marietta Energy Systems, Inc. (Oak Ridge TN 02)
인용정보	피인용 횟수 : 55 인용 특허 : 0

초록 ▼

A process and structure wherein a film comprised of a perovskite or a spinel is built epitaxially upon a surface, such as an alkaline earth oxide surface, involves the epitaxial build up of alternating constituent metal oxide planes of the perovskite or spinel. The first layer of metal oxide built upon the surface includes a metal element which provides a small cation in the crystalline structure of the perovskite or spinel, and the second layer of metal oxide built upon the surface includes a metal element which provides a large cation in the crystalline structure of the perovskite or spinel. The layering sequence involved in the film build up reduces problems which would otherwise result from the interfacial electrostatics at the first atomic layers, and these oxides can be stabilized as commensurate thin films at a unit cell thickness or grown with high crystal quality to thicknesses of 0.5-0.7 m

대표청구항 ▼

A process for coating a body with an epitaxial film wherein the body has a surface provided by an alkaline earth oxide, the process comprising the steps of: growing, by molecular beam epitaxy (MBE) techniques, a single plane of metal oxide having oxygen and a metal element of a group of metals consisting of Ti, Zr, Hf, V, Cr, Mn, Fe, Co, Ni and Cu upon the alkaline earth oxide surface wherein the oxygen and metal atoms of the metal oxide are deposited upon the alkaline earth oxide surface in quantities sufficient to construct a single plane of the metal oxide and come to rest during the deposition process at ordered sites across the alkaline earth oxide surface.

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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연합인증

Process for growing a film epitaxially upon an oxide surface and structures formed with the process 원문보기

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Process for growing a film epitaxially upon an oxide surface and structures formed with the process 원문보기

초록 ▼

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연구과제 타임라인

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