Method and apparatus for the step-by-step and automatic loading and unloading of a coating apparatus
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B65G-057/00
출원번호
US-0267793
(1994-06-28)
우선권정보
DE-4340522 (1993-11-29)
발명자
/ 주소
Kempf Stefan (Alzenau DEX)
출원인 / 주소
Leybold Aktiengesellschaft (Hanau DEX 03)
인용정보
피인용 횟수 :
27인용 특허 :
0
초록▼
A first turntable (4) has a plurality of posts (6) equidistantly distributed and arranged in a circle on the turntable (4), wherein a plurality of substrates (7) can be stacked on each post (6). Stationary loading (9) and unloading stations (10 11) are provided and the distance between each pair of
A first turntable (4) has a plurality of posts (6) equidistantly distributed and arranged in a circle on the turntable (4), wherein a plurality of substrates (7) can be stacked on each post (6). Stationary loading (9) and unloading stations (10 11) are provided and the distance between each pair of adjacent stations (9, 10, 11) corresponds to the distance between each pair of adjacent posts (6), the first turntable being rotated stepwise so that each post can be stopped successively at adjacent stations. A second turntable (12) is rotated stepwise through a loading station (15), a transfer station (16) and an unloading station (17). A loading arm transfers substrates from the loading station of the first turntable to the loading station of the second turntable, a transfer arm transfers the substrates from the transfer station to a coating station, and an unloading arm transfers coated substrates from the unloading station of the second turntable to either of the two unloading stations of the first turntable. A control system (33) includes a sensor (29), a counting device (30) and a servo motor (31), the servo motor (31) driving the unloading arm (21), the unloading station which receives a substrate being selected by the control system (33).
대표청구항▼
Apparatus for transferring disk-shaped substrates to and from a coating station, said apparatus comprising a first turntable having a plurality of posts equidistantly distributed and arranged in a circle on the first turntable so that a plurality of disk-shaped substrates can be arranged on each pos
Apparatus for transferring disk-shaped substrates to and from a coating station, said apparatus comprising a first turntable having a plurality of posts equidistantly distributed and arranged in a circle on the first turntable so that a plurality of disk-shaped substrates can be arranged on each post, said first turntable being rotatable stepwise about a fixed axis so that each post can be stopped successively at a loading station, a first unloading station, and a second unloading station, the distance between stations being a multiple of the distance between posts, a second turntable having a plurality of posts equidistantly distributed and arranged in a circle on the second turntable so that a plurality of disk-shaped substrates can be arranged on each post, said second turntable being rotatable stepwise about a fixed axis so that each post can be stopped successively at a loading station, a transfer station, and an unloading station, the distance between stations being a multiple of the distance between posts, a loading arm arranged to pick up a substrate at the loading station of the first turntable, rotate through an angle, and put down the substrate at the loading station of the second turntable, a transfer arm arranged to pick up a substrate at the transfer station of the second turntable, rotate through an angle, put down the substrate at a coating station, pick up the substrate at the coating station, rotate through an angle, and put down the substrate at the transfer station, an unloading arm arranged to pick up a substrate at the unloading station of the second turntable, rotate through one of a first and second angle, and put down the substrate at one of the first and second unloading stations of the first turntable, and a sensor which monitors the loading station of the first turntable and generates a signal when there are no more substrates present at the loading station of the first turntable, and a counter which controls the stepwise rotation of the first turntable and the angle through which the unloading arm rotates in response to the signal from the sensor.
연구과제 타임라인
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이 특허를 인용한 특허 (27)
Lenz, Eric H., Airflow management for low particulate count in a process tool.
Ke Ling Lee ; Mikhail Mazur ; Ken Lee ; Robert M. Martinson, System and method for transporting and sputter coating a substrate in a sputter deposition system.
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