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Process for coating diamond-like carbon film and coated thin strip 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-003/06
  • B01J-003/06
  • C23F-001/00
출원번호 US-0197018 (1994-02-15)
우선권정보 JP-0254756 (1990-09-25); JP-0117735 (1991-05-22)
발명자 / 주소
  • Okada Morihiro (25
  • Soomon-cho Kawasaki JPX) Yoshikawa Kiyoshi (25
  • Soomon-cho Kinugasa
  • Kita-ku
  • Kyoto-shi
  • Kyoto JPX) Yamamoto Yasushi (Room 11-408
  • Kyoto University Staff Official Residence
출원인 / 주소
  • Nippon Steel Corporation (Tokyo JPX 03) Yoshikawa
  • Kiyoshi (Kyoto JPX 05) Yamamoto
  • Yasushi (Kyoto JPX 05) Toku
  • Hisayuki (Kyoto JPX 05)
인용정보 피인용 횟수 : 57  인용 특허 : 0

초록 ▼

A process for coating a substrate surface with a diamond-like carbon film, in which a starting material gas comprising a hydrocarbon compound is introduced into a Hall accelerator ion source with an inner pressure thereof reduced to 1×10-5 to 1×10-1 Torr, an ion beam in which 80% or more of the ion

대표청구항 ▼

A process for coating a substrate surface with a diamond-like carbon film, which comprises introducing a starting material gas comprising a hydrocarbon compound into a Hall accelerator ion source, wherein said ion source has an acceleration region surrounded by a coaxial cylindrical insulator withou

이 특허를 인용한 특허 (57)

  1. Campi, Jim G.; Van Den Broeke, Douglas J., Binary and phase-shift photomasks.
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  2. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method.
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  3. Veerasamy, Vijayen S., Coated article with DLC inclusive layer(s) having increased hydrogen content at surface area.
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  4. Drewes, Joel A.; Bogart, Gregory R.; Etter, Jeffrey B.; Steaffens, Jeffrey W.; Ostroff, Rachel M.; Crosby, Mark, Device for mass transport assisted optical assays.
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  5. Springer Robert W. (Los Alamos NM), Flow-through ion beam source.
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  6. Drewes,Joel A.; Bogart,Gregory R.; Etter,Jeffrey B.; Steaffens,Jeffrey W.; Ostroff,Rachel M.; Crosby,Mark, Flow-through optical assay devices providing laminar flow of fluid samples, and methods of construction thereof.
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  7. Keishi Tano JP, Gauge block.
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  8. Tano, Keishi, Gauge block.
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  9. Yukio Miya JP; Osamu Sugiyama JP; Ryota Koike JP; Takashi Toida JP; Sosaku Kimura JP; Kunihiko Kokubo JP, Guide bush and method of forming hard carbon film over the inner surface of the guide bush.
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  10. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
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  11. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
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  12. Veerasamy, Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
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  13. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Hydrophobic coating including DLC and/or FAS on substrate.
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  14. Veerasamy Vijayen S., Hydrophobic coating including DLC on substrate.
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  15. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
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  16. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
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  17. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo, Hydrophobic coating with DLC & FAS on substrate.
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  18. Kevin J. Grannen ; Xiaoding Ma ; Jing Gui, Ion beam deposition of diamond-like carbon overcoats by hydrocarbon source gas pulsing.
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  19. Knapp Bradley J. ; Kimock Fred M. ; Petrmichl Rudolph H. ; Galvin Norman D., Ion beam process for deposition of highly abrasion-resistant coatings.
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  20. Takahashi, Yukihiro; Hamamoto, Terufumi; Shinde, Kenichi, Ion gun system, vapor deposition apparatus, and method for producing lens.
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  21. Yamashita, Takatoshi, Ion source and operation method thereof.
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  22. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Low-E coating system including protective DLC.
    상세보기
  23. Ma Xiaoding ; Grannen Kevin J. ; Gui Jing ; McCann Jeffrey A. ; Shows Mark A., Magnetic recording medium having a nitrogen-doped hydrogenated carbon protective overcoat.
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  24. Woo, Yi-Ren; Brendzel, Avrom M.; Cai, Chad Qingshen; Peterson, Stephen A., Medical article with a diamond-like carbon coated polymer.
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  25. McLeod, Paul Stephen; Shows, Mark A., Method & apparatus for multilayer deposition utilizing a common ion beam source.
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  26. McLeod, Paul Stephen; Shows, Mark A., Method and apparatus for multilayer deposition utilizing a common beam source.
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  27. Mahoney Leonard Joseph ; Brown David Ward ; Petrmichl Rudolph Hugo, Method for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source.
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  28. Hirakuri, Kenji; Ozeki, Kazuhide, Method for forming diamond-like carbon film.
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  29. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of depositing DLC inclusive coating on substrate.
    상세보기
  30. Veerasamy, Vijayen S.; Thomsen, Scott V., Method of depositing DLC on substrate.
    상세보기
  31. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of deposition DLC inclusive layer(s) using hydrocarbon and/or siloxane gas(es).
    상세보기
  32. Friedmann Thomas A. ; Sullivan John P., Method of forming a stress relieved amorphous tetrahedrally-coordinated carbon film.
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  33. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of ion beam milling a glass substrate prior to depositing a coating system thereon, and corresponding system for carrying out the same.
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  34. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon.
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  35. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of making a coated article including DLC and FAS.
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  36. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Method of making coated article including DLC inclusive layer over low-E coating.
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  37. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of making coated article including diamond-like carbon (DLC) and FAS.
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  38. Veerasamy, Vijayen S., Method of making coated article including layer(s) of diamond-like carbon which may be hydrophobic.
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  39. Veerasamy, Vijayen S., Method of making coating article including carbon coating on glass.
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  40. Veerasamy,Vijayen S., Method of making heat treatable coated article with diamond-like carbon (DLC) inclusive layer.
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  41. Veerasamy, Vijayen S., Method of making heat treatable coated article with protective layer.
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  42. Vijayen S. Veerasamy, Method of making hydrophobic coated article.
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  43. Cunningham, Nicolas; Hay, Allan S.; Dodelet, Jean-Pol; Meng, Yeuzhong, Multi-layers coating for protecting metallic substrates.
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  44. Ma, Xiaoding; Grannen, Kevin J.; Gui, Jing; McCann, Jeffrey A.; Shows, Mark A., Nitrogen-doped hydrogenated carbon films by ion beam deposition.
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  45. Jin, Michael S.; Lee, Sing H.; Reynolds, James A., Phase-shift masks and methods of fabrication.
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  46. Vijayen S. Veerasamy, Process for depositing DLC inclusive coating with surface roughness on substrate.
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  47. Wu Richard L.C. ; Lanter William C. ; Bletzinger Peter, Process for large area deposition of diamond-like carbon films.
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  48. Murase, Hitotoshi; Shimo, Toshihisa; Nomura, Shinfuku; Toyota, Hiromichi; Yamashita, Hiroshi; Kuramoto, Makoto, Process for producing an amorphous carbon film.
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  49. Williams Kurt E. ; Druz Boris L. ; Hines Danielle S. ; Londono Jhon F., Reactive ion beam etching method and a thin film head fabricated using the method.
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  50. Cooper Clark V. ; Bushnell Paul J. ; Mertell Martin M., Rotary compressor with reduced lubrication sensitivity.
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  51. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Solar management coating system including protective DLC.
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  52. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Solar management coating system including protective DLC.
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  53. Guseva, Malvina B.; Novikov, Nikolay D.; Babaev, Vladimir G.; Adamyan, Arnold A.; Lavygin, Igor A., Tetracarbon.
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  54. Malvina B. Guseva RU; Nikolay D. Novikov RU; Vladimir G. Babaev RU; Arnold A. Adamyan RU; Igor A. Lavygin RU, Tetracarbon.
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  55. Malvina B. Guseva RU; Nikolay D. Novikov RU; Vladimir G. Babaev RU; Arnold A. Adamyan RU; Igor A. Lavygin RU, Tetracarbon.
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  56. Ma,Xiaoding; Grannen,Kevin J.; Gui,Jing; McCann,Jeffrey A.; Shows,Mark A., Thin-film magnetic recording media with dual intermediate layer structure for increased coercivity.
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  57. Loree ; II Howard M. ; Gernes David B. ; Armini Anthony J. ; Gadarowski Dennis A., Wear-resistant bearings.
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