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Method for obtaining metallurgical stability in integrated circuit conductive bonds 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/44
출원번호 US-0238995 (1994-05-06)
발명자 / 주소
  • Ramsey Thomas H. (Rowlett TX) Alfaro Rafael C. (Carrollton TX)
출원인 / 주소
  • Texas Instruments Incorporated (Dallas TX 02)
인용정보 피인용 횟수 : 33  인용 특허 : 0

초록

A method for electrically connecting integrated circuit copper-gold ball bond that connect a bond wire (18) with a bond pad (14) forms a palladium layer (16) in the electrical connection between the bond wire (18) and the bond pad (14). The connection avoids excessive stresses that arise from interm

대표청구항

A method for electrically associating a ball bond wire with an aluminum pad, comprising the steps of: forming a palladium layer on an aluminum bond pad; and connecting the aluminum ball bond wire with the palladium layer to electrically connect the bond pad with the bond wire.

이 특허를 인용한 특허 (33)

  1. Bayerer, Reinhold, Bonded system with coated copper conductor.
  2. Oh,Steve Tchang Hun; Choi,Hong K.; Tsaur,Bor Yeu; Fan,John C. C., Bonding pad for gallium nitride-based light-emitting device.
  3. Oh,Tchang Hun; Choi,Hong K.; Fan,John C. C.; Narayan,Jagdish, Bonding pad for gallium nitride-based light-emitting devices.
  4. Chopra, Dinesh; Fishburn, Fred, Conductive connection forming methods, oxidation reducing methods, and integrated circuits formed thereby.
  5. Chopra,Dinesh; Fishburn,Fred, Conductive connection forming methods, oxidation reducing methods, and integrated circuits formed thereby.
  6. Chopra,Dinesh; Fishburn,Fred, Conductive connection forming methods, oxidation reducing methods, and integrated circuits formed thereby.
  7. Chopra,Dinesh; Fishburn,Fred, Conductive connection forming methods, oxidation reducing methods, and integrated circuits formed thereby.
  8. Narayan, Jagdish, Domain epitaxy for thin film growth.
  9. Riou, Jean-Christophe; Peyrard, Michel; Bailly, Eric, Electronic module for a piece of vehicle-borne aeronautic equipment and a piece of aeronautic equipment for an aeronautic vehicle.
  10. Colgan Evan George ; Rodbell Kenneth Parker ; Totta Paul Anthony ; White James Francis, Interconnect structure using Al.sub.2 -Cu for an integrated circuit chip.
  11. Hess, Kevin J.; Lee, Chu-Chung, Localized alloying for improved bond reliability.
  12. Hess, Kevin J.; Lee, Chu-Chung, Localized alloying for improved bond reliability.
  13. Schoenfeld, Aaron; Ma, Manny K. F.; Kinsman, Larry D.; Brooks, J. Mike; Allen, Timothy J., Method and apparatus for coupling a semiconductor die to die terminals.
  14. Schoenfeld, Aaron; Ma, Manny K. F.; Kinsman, Larry D.; Brooks, J. Mike; Allen, Timothy J., Method and apparatus for coupling a semiconductor die to die terminals.
  15. Schoenfeld, Aaron; Ma, Manny K. F.; Kinsman, Larry D.; Brooks, J. Mike; Allen, Timothy J., Method and apparatus for coupling a semiconductor die to die terminals.
  16. Stierman, Roger J.; Moore, Thomas M.; Shinn, Gregory B., Method for reworking metal layers on integrated circuit bond pads.
  17. Stierman, Roger J.; Moore, Thomas M.; Shinn, Gregory B., Method for reworking metal layers on integrated circuit bond pads.
  18. Ball Michael B., Method of improving interconnect of semiconductor device by utilizing a flattened ball bond.
  19. Ball Michael B., Method of improving interconnect of semiconductor devices by using a flattened ball bond.
  20. Michael B. Ball, Method of improving interconnect of semiconductor devices by using a flattened ball bond.
  21. Ball Michael B., Method of improving interconnect of semiconductor devices by utilizing a flattened ball bond.
  22. Ball, Michael B., Method of improving interconnect of semiconductor devices by utilizing a flattened ball bond.
  23. Hatano, Masaaki; Usui, Takamasa, Semiconductor device.
  24. Suzuki Kouichi,JPX ; Sato Sadanobu,JPX ; Yamashita Yumiko,JPX, Semiconductor device having metal alloy for electrodes.
  25. Kurihara, Toshimichi; Toda, Tetsu; Tsubaki, Shigeki, Semiconductor device with an improved bonding pad structure and method of bonding bonding wires to bonding pads.
  26. Miyaki, Yoshinori; Suzuki, Hiromichi; Kaneda, Tsuyoshi, Semiconductor integrated circuit device and method of manufacturing the same.
  27. Miyaki,Yoshinori; Suzuki,Hiromichi; Kaneda,Tsuyoshi, Semiconductor integrated circuit device and method of manufacturing the same.
  28. Miyaki,Yoshinori; Suzuki,Hiromichi; Kaneda,Tsuyoshi, Semiconductor integrated circuit device and method of manufacturing the same.
  29. Miyaki,Yoshinori; Suzuki,Hiromichi; Kaneda,Tsuyoshi, Semiconductor integrated circuit device and method of manufacturing the same.
  30. Chittipeddi, Sailesh; Merchant, Sailesh Mansinh, Wire bonding method for copper interconnects in semiconductor devices.
  31. Uno, Tomohiro; Terashima, Shinichi; Kimura, Keiichi; Yamada, Takashi; Nishibayashi, Akihito, Wire bonding structure and method for forming same.
  32. Huang, Wen Pin; Hsu, Cheng Tsung; Tseng, Cheng Lan; Hung, Chih Cheng; Chen, Yu Chi, Wirebonded semiconductor package.
  33. Lee, Ta-Chun, Wirebonded semiconductor package.
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