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특허 상세정보

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내보내기 페이스북 공유 카카오톡 공유

Infrared detector using a resonant optical cavity for enhanced absorption

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) G01J-005/20    H01L-027/14   
미국특허분류(USC) 250/3384 ; 250/33901 ; 257/436
출원번호 US-0765316 (1985-08-13)
발명자 / 주소
  • Spears David L. (Acton MA)
출원인 / 주소
  • Massachusetts Institute of Technology (Cambridge MA 02)
인용정보 피인용 횟수 : 49  인용 특허 : 0
초록
▼

A photodetector for detecting optical irradiation at a predetermined wavelength is provided with an integral, resonant optical cavity by forming a plurality of layers of material on a metallic reflector backing, the total optical thickness of those layers being an odd multiple of one-quarter of the predetermined wavelength. One of those layers is an active (i.e. optically-absorptive) semiconductor material. When the materials are deposited, that absorbing layer is formed at a level in the cavity including a region of peak optical field. As a result of th...

대표
청구항
▼

A photodetector for detecting optical radiation in a band centered about a predetermined wavelength, comprising: a. an optical cavity having a metallic reflector at a first end thereof and being open to receive optical radiation at a second, opposite end thereof, the total optical distance between the first and second ends of the cavity being an odd multiple of one-quarter of said predetermined wavelength, such that when the first end of the cavity is optically irradiated with energy within said band by a source outside the cavity, optical standing waves...

이 특허를 인용한 특허 (49)

  1. Dean Tran ; Edward A. Rezek ; Eric R. Anderson, Angle cavity resonant photodetector.
  2. Tran Dean ; Anderson Eric R. ; Rezek Edward A., Angle cavity resonant photodetector.
  3. Langner, Maik; Fröb, Hartmut; Lyssenko, Vadim G.; Sudzius, Markas; Leo, Karl, Apparatus for spectrometrically capturing light with a photodiode which is monolithically integrated in the layer structure of a wavelength-selective filter.
  4. Eden Dayton Dale ; Case William Edward ; Schimert Thomas R., Bandgap radiation detector.
  5. Eden Dayton Dale ; Case William Edward ; Schimert Thomas Robert, Bandgap radiation detector.
  6. Mitra, Pradip, Bias controlled multi-spectral infrared photodetector and imager.
  7. Brady, John F.; Syllaios, Athanasios J.; Schimert, Thomas R.; McCardel, William L.; Gooch, Roland W., Color correction for radiation detectors.
  8. Claiborne, Lewis T.; Mitra, Pradip, Diffraction grating coupled infrared photodetector.
  9. Claiborne, Lewis T.; Mitra, Pradip, Diffraction grating coupled infrared photodetector.
  10. Englund, Dirk R.; Gan, Xuetao, Graphene photonics for resonator-enhanced electro-optic devices and all-optical interactions.
  11. Schimert, Thomas R.; Syllaios, Athanasios J.; McCardel, William L.; Gooch, Roland W., Infrared detector elements and methods of forming same.
  12. Schimert, Thomas R.; Beratan, Howard R.; Hanson, Charles M.; Soch, Kevin L.; Tregilgas, John H., Infrared detector with amorphous silicon detector elements, and a method of making it.
  13. Wilfried Diekmann DE, Infrared optical gas sensor.
  14. Ueno, Koichiro; Kuze, Naohiro; Moriyasu, Yoshitaka; Nagase, Kazuhiro, Infrared sensor IC, and infrared sensor and manufacturing method thereof.
  15. Islam,M. Saif; Wang,Shih Yuan; Wu,Wei; Li,Zhiyong; Williams,R. Stanley, Integrated modular system and method for enhanced Raman spectroscopy.
  16. Wang,Shih Yuan, Integrated system and method for transversal enhanced Raman Spectroscopy.
  17. Englund, Dirk R., Lens-free planar imager using an optical resonator.
  18. Peytavit, Emilien; Lampin, Jean-François, Light mixer for generating terahertz radiation.
  19. Englund, Dirk R., Lossless hyperspectral imaging.
  20. Gooch, Roland W.; Schimert, Thomas R.; McCardel, William L.; Ritchey, Bobbi A., Microbolometer and method for forming.
  21. Terre, William A.; Woolaway, James T.; Jerominek, Hubert; Alain, Christine, Microbolometer detector with high fill factor and transducers having enhanced thermal isolation.
  22. Syllaios, Athanasios J.; Schimert, Thomas R.; Taylor, Michael F., Microbolometer infrared detector elements and methods for forming same.
  23. Jerominek Hubert,CAX ; Renaud Martin,CAX ; Swart Nicholas R.,CAX, Microbridge structure and method for forming a microstructure suspended by a micro support.
  24. Jerominek Hubert,CAX, Microbridge structure and method for forming the microbridge structure.
  25. Jerominek Hubert,CAX ; Renaud Martin,CAX ; Swart Nicholas R.,CAX, Microbridge structure for emitting or detecting radiations and method for forming such microbridge structure.
  26. Cole Barrett E., Microstructure design for high IR sensitivity.
  27. Jerominek Hubert,CAX ; Renaud Martin,CAX ; Swart Nicholas R.,CAX, Microstructure suspended by a microsupport.
  28. Islam,M. Saif; Wang,Shih Yuan; Wu,Wei; Li,Zhiyong; Williams,R. Stanley, Monolithic system and method for enhanced Raman spectroscopy.
  29. Mitra,Pradip, Multi-spectral infrared super-pixel photodetector and imager.
  30. Viens, Jean Francois; Agarwal, Anuradha M.; Kimerling, Lionel C., Multi-spectral pixel and focal plane array.
  31. Mitra, Pradip, Multi-wavelength high bandwidth communication receiver and system.
  32. Pautrat Jean-Louis,FRX ; Magnea Noel,FRX ; Hadji Emmanuel,FRX, Multispectral semiconductor resonant-cavity detector sensitive in at least two wavelength bands.
  33. Chen, Shu-Lu; Na, Yun-Chung, Photonic lock based high bandwidth photodetector.
  34. Chen, Shu-Lu; Na, Yun-Chung, Photonic lock based high bandwidth photodetector.
  35. Portier, Benjamin; Verdun, Michaël; Haidar, Riad; Pelouard, Jean-Luc; Pardo, Fabrice, Quantum detection element with low noise and method for manufacturing such a photodetection element.
  36. Dodd Mark A. ; Claiborne Lewis T., Quantum well infrared photocathode having negative electron affinity surface.
  37. Unlu,M. Selim; Emsley,Matthew K., Reflective layer buried in silicon and method of fabrication.
  38. Dodd Mark A., Resonant cavity field enhancing boundary.
  39. Tran Dean ; Rezek Edward A. ; Anderson Eric R. ; Jones William L., Resonant photodetector.
  40. Tran, Dean; Rezek, Edward A.; Anderson, Eric R.; Jones, William L., Resonant photodetector.
  41. Badano, Giacomo; Kriso, Christian, Semiconductor structure with two optically coupled optical resonant cavities and method of manufacturing such a structure.
  42. Gooch,Roland W.; Syllaios,Athanasios J.; Schimert,Thomas R.; McCardel,William L., Systems and methods for bonding.
  43. Syllaios,Athanasios J.; Schimert,Thomas R.; McCardel,William L.; Gooch,Roland W.; Brady,John F., Systems and methods for integrating focal plane arrays.
  44. Higashi Robert E. ; Holmen James O. ; Johnson Robert G., Thermal sensor.
  45. Syllaios, Athanasios J.; Taylor, Michael F.; Ajmera, Sameer K., Transitioned film growth for conductive semiconductor materials.
  46. Wehner, Justin Gordon Adams; Smith, Edward P.; Bostwick, Stephanie, Two color detector leveraging resonant cavity enhancement for performance improvement.
  47. Lewis Taylor Claiborne ; Pradip Mitra, Two-color grating coupled infrared photodetector.
  48. Englund, Dirk R.; Rastogi, Chaitanya, Ultracompact fabry-perot array for ultracompact hyperspectral imaging.
  49. Wood R. Andrew, Use of vanadium oxide in microbolometer sensors.

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