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Methods for passivating silicon devices at low temperature to achieve low interface state density and low recombination 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/02
출원번호 US-0249121 (1994-05-25)
발명자 / 주소
  • Chen Zhizhang (Duluth GA) Rohatgi Ajeet (Marietta GA)
출원인 / 주소
  • Georgia Tech Research Corporation (Atlanta GA 02)
인용정보 피인용 횟수 : 54  인용 특허 : 0

초록

A new process has been developed to achieve a very low SiOx/Si interface state density Dit, low recombination velocity S (eff (>5 ms) for oxides deposited on silicon substrates at low temperature. The technique involves direct plasma-enhanced chemical vapor deposition (PECVD), with appropriate growt

대표청구항

A method for passivating a surface of crystalline silicon, comprising the steps of: forming an oxide layer over said crystalline silicon using a plasma enhanced chemical vapor deposition process; and lowering an interface state density associated with said silicon by heating said oxide layer and sai

이 특허를 인용한 특허 (54)

  1. Weimer, Ronald A.; Gonzalez, Fernando, Ammonia gas passivation on nitride encapsulated devices.
  2. Morisako Isamu,JPX, Apparatus and method for surface treatment.
  3. Sargent, Edward Hartley; Tang, Jiang, Colloidal nanoparticle materials for photodetectors and photovoltaics.
  4. Weimer, Ronald A.; Gonzalez, Fernando, Gas passivation on nitride encapsulated devices.
  5. Sargent, Edward Hartley; Koleilat, Ghada; Levina, Larissa, Materials for electronic and optoelectronic devices having enhanced charge transfer.
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  7. Ivanov, Igor Constantin; Sargent, Edward Hartley; Tian, Hui, Materials, fabrication equipment, and methods for stable, sensitive photodetectors and image sensors made therefrom.
  8. Ivanov, Igor Constantin; Sargent, Edward Hartley; Tian, Hui, Materials, fabrication equipment, and methods for stable, sensitive photodetectors and image sensors made therefrom.
  9. Ivanov, Igor Constantin; Sargent, Edward Hartley; Tian, Hui, Materials, fabrication equipment, and methods for stable, sensitive photodetectors and image sensors made therefrom.
  10. Ivanov, Igor Constantin; Sargent, Edward Hartley; Tian, Hui, Materials, fabrication equipment, and methods for stable, sensitive photodetectors and image sensors made therefrom.
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  16. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  17. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  18. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  19. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  20. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  21. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  22. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  23. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  24. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  25. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  26. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  27. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  28. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  29. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
  30. Tian, Hui; Sargent, Edward, Materials, systems and methods for optoelectronic devices.
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  32. Weimer, Ronald A., Method of fabricating an integrated circuit with a dielectric layer exposed to a hydrogen-bearing nitrogen source.
  33. Prein Frank, Method of fabricating semiconductor chips with silicide and implanted junctions.
  34. Ruelke, Hartmut; Huy, Katja; Romero, Karla, Method of forming a TEOS cap layer at low temperature and reduced deposition rate.
  35. Ghneim Said N. ; Fulford ; Jr. H. Jim, Method of making non-volatile memory device having a floating gate with enhanced charge retention.
  36. Lee, Ju-Il, Method of manufacturing image sensor for reducing dark current.
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  42. Sargent, Edward Hartley; Jain, Rajsapan; Ivanov, Igor Constantin; Malone, Michael R.; Brading, Michael Charles; Tian, Hui; Della Nave, Pierre Henri Rene; Lee, Jess Jan Young, Photodetector comprising a pinned photodiode that is formed by an optically sensitive layer and a silicon diode.
  43. Sargent, Edward Hartley; Jain, Rajsapan; Ivanov, Igor Constantin; Malone, Michael R.; Brading, Michael Charles; Tian, Hui; Della Nave, Pierre Henri Rene; Lee, Jess Jan Young, Photodetector comprising a pinned photodiode that is formed by an optically sensitive layer and a silicon diode.
  44. Sargent, Edward Hartley; Jain, Rajsapan; Ivanov, Igor Constantin; Malone, Michael R.; Brading, Michael Charles; Tian, Hui; Nave, Pierre Henri Rene Della; Lee, Jess Jan Young, Photodetector comprising a pinned photodiode that is formed by an optically sensitive layer and a silicon diode.
  45. Sargent, Edward Hartley; Koleilat, Ghada; Levina, Larissa, Photodetectors and photovoltaics based on semiconductor nanocrystals.
  46. Sargent, Edward Hartley; Koleilat, Ghada; Levina, Larissa, Photodetectors and photovoltaics based on semiconductor nanocrystals.
  47. Sargent, Edward Hartley; Koleilat, Ghada; Levina, Larissa, Photodetectors and photovoltaics based on semiconductor nanocrystals.
  48. Lee Ming-Kwei,TWX, Pretreatment method of a silicon wafer using nitric acid.
  49. Ridley Rodney S. ; Trost Jason R. ; Webb Raymond J., Process for forming high voltage junction termination extension oxide.
  50. Wolfgang Arndt DE; Klaus Graff DE; Alfons Hamberger DE; Petra Heim DE, Process for manufacturing a silicon semiconductor device having a reduced surface recombination velocity.
  51. Arndt Wolfgang,DEX ; Graff Klaus,DEX ; Hamberger Alfons,DEX ; Heim Petra,DEX, Process for reducing the surface recombination speed in silicon.
  52. Weimer,Ronald A., Process of forming an electrically erasable programmable read only memory with an oxide layer exposed to hydrogen and nitrogen.
  53. Sargent, Edward Hartley; Johnston, Keith William; Pattantyus-Abraham, Andras Geza; Clifford, Jason Paul, Schottky-quantum dot photodetectors and photovoltaics.
  54. Veeramma, Subhas Chandra Bose Jayappa, Semiconductor power device with passivation layers.
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