[특허]Micro-hotplate devices and methods for their fabrication

Micro-hotplate devices and methods for their fabrication 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H05B-003/00 G01F-001/68 H01C-001/012
출원번호	US-0965947 (1992-10-26)
발명자 / 주소	Gaitan Michael (Gaithersburg MD) Suehle John S. (Westminister MD) Semancik Stephen (Mt. Airy MD) Cavicchi Richard E. (Washington Grove MD)
출원인 / 주소	The United States of America as represented by the Secretary of Commerce (Washington DC 06)
인용정보	피인용 횟수 : 39 인용 특허 : 0

초록 ▼

A design and fabrication methodology, for silicon micromachined micro-hotplates which are manufactured using commercial CMOS foundries techniques with additional post-fabrication processing. The micro-hotplates are adaptable for a host of applications. The methodology for the fabrication of the micro-hotplates is based on commercial CMOS compatible micromachining techniques. The novel aspects of the micro-hotplates are in the design, choice and layout of the materials layers, and the applications for the devices. The micro-hotplates have advantages over other similar devices in the manufacture by a standard CMOS process which include low-cost and easy integration of VLSI circuits for drive, communication, and control. The micro-hotplates can be easily incorporated into arrays of micro-hotplates each with individualized circuits for control and sensing for independent operation.

대표청구항 ▼

A micro-hotplate device which comprises: a support substrate; a microbridge structure formed on said support substrate, said microbridge structure having a suspended portion; a heating element formed directly on said microbridge structure so as to be thermally isolated from said support substrate; a layer of electrically insulating material formed directly on said heating element; and a conductive heat distribution plate formed directly on said layer of electrically insulating material, said conductive heat distribution plate being centrally located over said microbridge structure.

이 특허를 인용한 특허 (39)

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Dimeo, Jr.,Frank; Chen,Philip S. H.; Neuner,Jeffrey W.; Welch,James; Stawacz,Michele; Baum,Thomas H.; King,Mackenzie E.; Chen,Ing Shin; Roeder,Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
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Dimeo, Jr.,Frank; Chen,Philip S. H.; Neuner,Jeffrey W.; Welch,James; Stawasz,Michele; Baum,Thomas H.; King,Mackenzie E.; Chen,Ing Shin; Roeder,Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
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Chen,Philip S. H.; Chen,Ing Shin; Dimeo, Jr.,Frank; Neuner,Jeffrey W.; Welch,James; Roeder,Jeffrey F., Apparatus and process for sensing target gas species in semiconductor processing systems.
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Manginell, Ronald P.; Frye-Mason, Gregory C., Chemical preconcentrator with integral thermal flow sensor.
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King, William P.; Lee, Jungchul, Device for calorimetric measurement.
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Roth Mathias,DEX ; Endres Hanns-Erik,DEX ; Trankler Hans-Rolf,DEX, Device for the encapsulated reception of a material.
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Law, Kock-Yee, Digital fuser using micro hotplate technology.
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Ali, Syed Zeeshan; Udrea, Florin; Gardner, Julian William, Electromigration reduction in micro-hotplates.
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Vig John R. (Colts Neck NJ), High sensitivity temperature sensor and sensor array.
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Morrett Kent E. ; Nowak Edward J. ; St. Onge Stephen A. ; Watts Josef S., Method and apparatus to match semiconductor device performance.
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Mansky, Paul, Method for conducting sensor array-based rapid materials characterization.
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Paul Mansky ; James Bennett, Method for conducting sensor array-based rapid materials characterization.
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Kunt Tekin ; Cavicchi Richard E. ; Semancik Stephen ; McAvoy Thomas J., Method for operating a sensor to differentiate between analytes in a sample.
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Ahn, Bum Mo; Park, Seung Ho; Byun, Sung Hyun, Micro heater and micro sensor and manufacturing methods thereof.
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Ahn, Bum Mo; Park, Seung Ho; Byun, Sung Hyun, Micro heater, micro sensor and micro sensor manufacturing method.
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Mitchel J. Doktycz ; Charles L. Britton, Jr. ; Stephen F. Smith ; Patrick I. Oden ; William L. Bryan ; James A. Moore ; Thomas G. Thundat ; Robert J. Warmack, Micro-machined calorimetric biosensors.
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King, William P.; Felts, Jonathan R.; Prater, Craig; Kjoller, Kevin, Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer.
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Horovitz, Michael L.; Anderson, Karl F., Sensor device and method for qualitative and quantitative analysis of gas phase substances.
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Horovitz,Michael L.; Anderson,Karl F., Sensor device and method for qualitative and quantitative analysis of gas phase substances.
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Bauer,Michael; Simon,Isolde; Arndt,Michael, Sensor module having a sensor element surrounded by a heating element.
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McFadden,Curt; Hermsen,Kenneth David; Earle,Roger W.; Edwards,James; Leppert,Kerry W.; Jackson,Eric; Garz,Eric; Lockwood,Mark; Meek,John L., Stirring hot plate.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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연합인증

Micro-hotplate devices and methods for their fabrication 원문보기

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Micro-hotplate devices and methods for their fabrication 원문보기

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이 특허를 인용한 특허 (39)

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