$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Specimen holder and apparatus for two-sided ion milling system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/00
  • H01L-021/306
  • B44C-001/22
  • C03C-015/00
출원번호 US-0339483 (1994-11-14)
발명자 / 주소
  • Swann Peter R. (St. Johns CA AGX) Alani Reza (Pleasanton CA)
출원인 / 주소
  • Gatan, Inc. (Pleasanton CA 02)
인용정보 피인용 횟수 : 29  인용 특허 : 0

초록

An apparatus and a specimen holder adapted to permit simultaneous two-sided ion beam milling at very low angles of beam incidence, down to 0°, from both sides of the specimen is provided and includes a specimen holder for two-sided ion beam milling and a pedestal having at least one extending specim

대표청구항

A method for the two-sided ion beam milling of specimens comprising the steps of: providing a specimen having first and second major surfaces and a peripheral edge to be milled to a vacuum chamber and securing said specimen such that at least a portion of said peripheral edge remains unrestrained, e

이 특허를 인용한 특허 (29)

  1. Mitro Richard J. ; Alani Reza ; Malaszewski Leszek, Apparatus for etching and coating sample specimens for microscopic analysis.
  2. Maciejewski, Wendell C.; Sasko, Douglas; Motin, Gary N., Head window fixture and method.
  3. Lee,Myoung Rack; Lee,Sun Young, Inspection by a transmission electron microscope of a sample.
  4. Alani, Reza, Ion beam milling system and method for electron microscopy specimen preparation.
  5. Alani, Reza, Ion beam milling system and method for electron microscopy specimen preparation.
  6. Coyle, Steven Thomas; Hunt, John Andrew, Ion beam sample preparation apparatus and methods.
  7. Coyle, Steven Thomas; Hunt, John Andrew, Ion beam sample preparation apparatus and methods.
  8. Coyle, Steven Thomas; Hunt, John Andrew, Ion beam sample preparation apparatus and methods.
  9. Coyle, Steven Thomas; Hunt, John Andrew, Ion beam sample preparation apparatus and methods.
  10. Coyle, Steven Thomas; Hunt, John Andrew, Ion beam sample preparation apparatus and methods.
  11. Coyle, Steven Thomas; Hunt, John Andrew; Hassel-Shearer, Michael Patrick, Ion beam sample preparation apparatus and methods.
  12. Coyle, Steven Thomas; Hunt, John Andrew; Hassel-Shearer, Michael Patrick, Ion beam sample preparation apparatus and methods.
  13. Hunt, John Andrew; Coyle, Steven Thomas; Hassel-Shearer, Michael Patrick, Ion beam sample preparation apparatus and methods.
  14. Coyle, Steven Thomas; Hunt, John Andrew, Ion beam sample preparation thermal management apparatus and methods.
  15. Coyle, Steven Thomas; Hunt, John Andrew, Ion beam sample preparation thermal management apparatus and methods.
  16. Adams, Robbie, Ion fusion formation.
  17. Robinson, Joseph C., Method and apparatus for in situ preparation of serial planar surfaces for microscopy.
  18. Kolosov, Oleg Victor; Grishin, Ilja, Method and apparatus for ion beam polishing.
  19. Robinson, Joseph C., Method and apparatus for preparing serial planar cross sections.
  20. Moore, Thomas M.; Amador, Gonzalo, Method and apparatus for transfer of samples in a controlled environment.
  21. Grünewald, Wolfgang; Vogt, Alex; Gabathuler, Alexander, Method for the production of a sample for electron microscopy.
  22. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of ion beam milling a glass substrate prior to depositing a coating system thereon, and corresponding system for carrying out the same.
  23. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon.
  24. Thomsen, Scott V.; Petrmichl, Rudolph Hugo; Veerasamy, Vijayen S.; Longobardo, Anthony V.; Luten, Henry A.; Hall, Jr., David R., Method of manufacturing window using ion beam milling of glass substrate(s).
  25. Moran, Timothy J., Method of pole tip sample preparation using FIB.
  26. LeVan Dien ; Miller Robert Dennis ; Nazzal Adel Issa ; Ting Andrew Chiuyan, Planarization process and apparatus for the etch definition of magnetic head air bearing surfaces.
  27. Washino,Ryu; Sakuma,Yasushi; Mukaikubo,Masaru; Harpreet Singh,Hura; Uchida,Kenji, Polishing method for semiconductor substrate, and polishing jig used therein.
  28. Lechner, Lorenz; Kaiser, Ute; Biskupek, Johannes, TEM-lamella, process for its manufacture, and apparatus for executing the process.
  29. Suzuki, Hidekazu, Thin piece forming method.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로