[특허]Reinforced semiconductor wafer holder

Reinforced semiconductor wafer holder 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B65D-085/30
출원번호	US-0247887 (1994-05-23)
발명자 / 주소	Gregerson Barry (Colorado Springs CO) Wittman Boyd (Colorado Springs CO)
출원인 / 주소	Empak, Inc. (Chanhassen MN 02)
인용정보	피인용 횟수 : 47 인용 특허 : 0

초록 ▼

An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The device includes a cover with a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. It also includes a purging means attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder. The holder has contoured recess-forming pairs that do not effect semiconductor wafer transfer when the recess forming pairs are warped. The recess-forming pairs also have integrally corresponding ribs that help prevent warpage of the contoured recess-forming pairs during the plastic injection molding process.

대표청구항 ▼

A cassette for securely containing semiconductor wafers comprising: a container having spaced parallel solid sides having opposed interior surfaces, an open top end, and including a lip extending peripherally around said open top end, a plurality of slot-forming spacer means aligned on said opposing interior surfaces forming a plurality of aligned parallel slots to support semiconductor wafers, said slot-forming spacer means are configured to facilitate automated insertion and removal of wafers supported in said slots wherein a top portion of each slot-forming spacer means near the open top end is narrower in width than, and extends from one of said interior surfaces less than, a relatively lower, middle portion of the slot-forming spacer means. A cassette for securely containing semiconductor wafers comprising: a container having spaced parallel solid sides having opposed interior surfaces, an open top end, and including a lip extending peripherally around said open top end, a plurality of dividers, each protruding inwardly to an apex, on said opposing interior surfaces and forming a plurality of parallel slots to support semiconductor wafers, and exterior ribs extending downwardly from said lip to a cassette bottom, each rib protruding outwardly to an apex from an exterior surface of said solid sides of said container, whereby the apex of each of said exterior ribs is substantially aligned with the apex of one of said dividers in a direction perpendicular to the surfaces to inhibit warpage of each of said dividers.

이 특허를 인용한 특허 (47)

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Song, Si Hyun, Cassette device for accepting substrates.
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Mimken Victor B. ; Krawzak Tom, Compliant silicon wafer handling system.
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Haggard,Clifton C.; Thomas,James R.; Chen,Song Ping; Liu,Ru Zheng, Container with an adjustable inside dimension that restricts movement of items within the container.
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James, Frankie; Tay, Kwok Lim, Disk placement and storage assembly with disk cassette and disk slotter.
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Allen, Joseph, Manufacturing single-sided storage media.
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Brooks Ray G., Method and apparatus for packaging contaminant-sensitive articles and resulting package.
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Kim,Kwang Kon; Clasara,Ramon, Method for manufacturing single-sided sputtered magnetic recording disks.
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Kim, Kwang Kon; Clasara, Ramon, Method for producing single-sided sputtered magnetic recording disks.
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Buitron,Gerardo; Cheng,Peter; Crofton,Walter; Kim,Kwang Kon; Maida,William; Newman,David, Method of lubricating multiple magnetic storage disks in close proximity.
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Buitron, Gerardo, Method of merging two disks concentrically without gap between disks.
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Buitron,Gerardo; Gapay,Clarence; Grow,John; Hachtmann,Bruce; Kim,Kwang Kon; Nguyen,Huan; O'Hare,Tom, Method of simultaneous two-disk processing of single-sided magnetic recording disks.
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Mastroianni Sal, Process for forming a semiconductor device.
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Kikuchi Hisashi,JPX ; Ishii Katsumi,JPX, Processing method and processing unit for substrate.
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Tsai, Yu-Pin; Pao, Chih-Min; Tseng, Ching-Feng; Chu, Fu-Tang, Semiconductor wafer cassette.
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Kinkead Devon A. ; Joffe Michael A., Storing substrates between process steps within a processing facility.
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Tiang Fong Han SG, Stud and ride for use on matrix trays.
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Han,Tiang Fong, Stud and rider for use on matrix trays.
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Hasegawa,Akihiro; Mimura,Hiroshi, Substrate storage container.
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Ejima Kazutoshi,JPX ; Hyobu Yukihiro,JPX, Thin-plate supporting container with filter means.
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Ejima Kazutoshi,JPX ; Hyobu Yukihiro,JPX, Thin-plate supporting container with unitary porous gasket.
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Buitron, Gerardo; Grow, John, W-patterned tools for transporting/handling pairs of disks.
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Nyseth David L., Wafer carrier.
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Bores, Gregory W.; Zabka, Michael C., Wafer carrier having a low tolerance build-up.
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Kim Moon-Kwan,KRX ; Park Dong-Myung,KRX, Wafer carrier with an anti-slip surface.
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Nyseth, David L., Wafer container with minimal contact.
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Eggum, Shawn D., Wafer enclosure sealing arrangement for wafer containers.
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Braga, Robert, Wafer paddle.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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Reinforced semiconductor wafer holder 원문보기

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Reinforced semiconductor wafer holder 원문보기

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이 특허를 인용한 특허 (47)

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