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Ferroelectric memory 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G11C-011/22
출원번호 US-0319809 (1994-10-07)
우선권정보 JP-0254378 (1993-10-12)
발명자 / 주소
  • Watanabe Hitoshi (Tokyo JPX) Kuroda Yoshimi (Funabashi JPX) Tadokoro Kaoru (Tokyo JPX)
출원인 / 주소
  • Olympus Optical Co., Ltd. (Tokyo CO JPX 03) Symetrix Corporation (Colorado Springs CO 02)
인용정보 피인용 횟수 : 62  인용 특허 : 0

초록

Disclosed is a ferroelectric memory, comprising a semiconductor substrate, a ferroelectric thin film capacitor of a laminate structure formed on the substrate, the laminate structure consisting of a lower electrode, an oxide ferroelectric thin film and an upper electrode, and a protective thin film

대표청구항

A ferroelectric memory, comprising: a semiconductor substrate; a ferroelectric thin film capacitor with a laminate structure formed on the substrate, said laminate structure including two electrode layers and an oxide ferroelectric layer arranged between the two electrode layers; and a protective la

이 특허를 인용한 특허 (62)

  1. Hickert George, Barrier layer to protect a ferroelectric capacitor after contact has been made to the capacitor electrode.
  2. Lucovsky, Gerald, Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics.
  3. Maejima Yukihiko,JPX, Capacitor and method of manufacturing the same.
  4. Hisayoshi Yamoto JP; Akihiko Ochiai JP, Capacitor having ferroelectric film and multiple layers of insulating and protective films for nonvolatile memory cell.
  5. Evans Thomas A. ; Argos ; Jr. George, Completely encapsulated top electrode of a ferroelectric capacitor.
  6. Eastep Brian Lee ; Evans Thomas A., Completely encapsulated top electrode of a ferroelectric capacitor using a lead-enhanced encapsulation layer.
  7. Eastep Brian Lee ; Evans Thomas A., Completely encapsulated top electrode of a ferroelectric capacitor using a lead-enhanced escapsulation layer.
  8. Zambrano, Raffaele, Contact structure for a ferroelectric memory device.
  9. Zambrano, Raffaele; Artoni, Cesare; Corvasce, Chiara, Contact structure for an integrated semiconductor device.
  10. Zambrano,Raffaele; Artoni,Cesare; Corvasce,Chiara, Contact structure for an integrated semiconductor device.
  11. Zambrano, Raffaele, Contact structure for semiconductor devices and corresponding manufacturing process.
  12. Zambrano, Raffaele, Contact structure for semiconductor devices and corresponding manufacturing process.
  13. Kirlin Peter S. ; Summerfelt Scott R. ; McIntryre Paul, Diffusion barriers between noble metal electrodes and metallization layers, and integrated circuit and semiconductor devices comprising same.
  14. Gu, Zongquan; Islam, Mohammad Anwarul; Spanier, Jonathan Eli, Engineered ferroelectric gate devices.
  15. Joseph D. Cuchiaro ; Carlos A. Paz de Araujo ; Larry D. McMillan, Ferroelectric integrated circuit having hydrogen barrier layer.
  16. Cuchiaro Joseph D. ; Furuya Akira,JPX ; Paz de Araujo Carlos A. ; Miyasaka Yoichi,JPX, Ferroelectric integrated circuit having low sensitivity to hydrogen exposure and method for fabricating same.
  17. Cuchiaro, Joseph D.; Furuya, Akira; Paz de Araujo, Carlos A.; Miyasaka, Yoichi, Ferroelectric integrated circuit having low sensitivity to hydrogen exposure and method for fabricating same.
  18. Cuchiaro Joseph D. ; Furuya Akira,JPX ; Paz de Araujo Carlos A. ; Miyasaka Yoichi,JPX, Ferroelectric integrated circuit with protective layer incorporating oxygen and method for fabricating same.
  19. Jung Dong-Jin,KRX ; Kim Ki-Nam,KRX, Ferroelectric memory device.
  20. Natori, Eiji; Kijima, Takeshi, Ferroelectric memory device and method of manufacturing the same.
  21. Jung, Dong-Jin; Kim, Ki-Nam, Ferroelectric memory device having improved ferroelectric characteristics.
  22. Ogata, Kiyoshi; Horikoshi, Kazuhiko; Suenaga, Kazufumi; Kato, Hisayuki; Yoshizumi, Keiichi; Yamazaki, Masahito, Ferroelectric memory device including an upper protection electrode.
  23. Evans Thomas A., Ferroelectric memory device structure useful for preventing hydrogen line degradation.
  24. Thomas A. Evans, Ferroelectric memory device structure useful for preventing hydrogen line degradation.
  25. Jung Dong-jin,KRX, Ferroelectric memory devices including capacitors located outside the active area and made with diffusion barrier layers.
  26. Mi-hyang Lee KR; Dong-jin Jung KR, Ferroelectric memory devices including patterned conductive layers.
  27. Bailey, Richard A., HYDROGEN BARRIER ENCAPSULATION TECHNIQUES FOR THE CONTROL OF HYDROGEN INDUCED DEGRADATION OF FERROELECTRIC CAPACITORS IN CONJUNCTION WITH MULTILEVEL METAL PROCESSING FOR NON-VOLATILE INTEGRATED CIRCU.
  28. Bailey Richard A., Hydrogen barrier encapsulation techniques for the control of hydrogen induced degradation of ferroelectric capacitors in conjunction with multilevel metal processing for non-volatile integrated circu.
  29. Amiotti, Marco; Jung, Jae Hak; Boffito, Claudio, Integrated capacitive device with hydrogen degradable dielectric layer protected by getter layer.
  30. Cuchiaro, Joseph D.; Furuya, Akira; Paz de Araujo, Carlos A.; Miyasaka, Yoichi, Integrated circuit having self-aligned hydrogen barrier layer and method for fabricating same.
  31. Whitaker, Mark R.; Marentette, Leslie Joseph, Interrupt generation and acknowledgment for RFID.
  32. Whitaker, Mark R., Low power, low pin count interface for an RFID transponder.
  33. Bryan C. Hendrix, Low temperature process for high density thin film integrated capacitors and amorphously frustrated ferroelectric materials therefor.
  34. Cuchiaro Joseph D. ; Furuya Akira,JPX ; Paz de Araujo Carlos A. ; Miyasaka Yoichi,JPX, Method for fabricating ferroelectric integrated circuits.
  35. Ooms William J. ; Marshall Daniel S. ; Hallmark Jerald A., Method for making a ferroelectric semiconductor device and a layered structure.
  36. Cuchiaro Joseph D. ; Furuya Akira,JPX ; Paz de Araujo Carlos A. ; Miyasaka Yoichi,JPX, Method of fabricating ferroelectric integrated circuit using dry and wet etching.
  37. Cuchiaro Joseph D. ; Furuya Akira,JPX ; Paz de Araujo Carlos A. ; Miyasaka Yoichi,JPX, Method of fabricating ferroelectric integrated circuit using oxygen to inhibit and repair hydrogen degradation.
  38. Evans Thomas A. ; Argos ; Jr. George, Method of fabricating partially or completely encapsulated top electrode of a ferroelectric capacitor.
  39. Zambrano, Raffaele, Method of forming a contact structure and a ferroelectric memory device.
  40. Yukihiko Maejima JP, Method of manufacturing a ferroelectric capacitor.
  41. Hikosaka, Yukinobu; Ozaki, Yasutaka; Takai, Kazuaki, Method of manufacturing a semiconductor device with a hydrogen barrier layer.
  42. Evans Thomas A., Method of manufacturing ferroelectric memory device useful for preventing hydrogen line degradation.
  43. Kato, Yoshikazu; Tani, Koji; Hashimoto, Takanori, Method of manufacturing semiconductor device having ferro-dielectric material film.
  44. Seh,Huankiat; Min,Yongki, Method of providing a pre-patterned high-k dielectric film.
  45. Kang Chang-seok,KRX, Methods of fabricating integrated circuit ferroelectric memory devices including a material layer on the upper electrodes of the ferroelectric capacitors thereof.
  46. Lucovsky, Gerald, Methods of forming binary noncrystalline oxide analogs of silicon dioxide.
  47. Gabric,Zvonimir; Hartner,Walter; Kr철nke,Matthias; Schindler,G체nther, Microelectronic structure having a hydrogen barrier layer.
  48. Onishi Shigeo (Nara JPX) Ishihara Kazuya (Kyoto JPX), Non-volatile random access memory and fabrication method thereof.
  49. Evans Thomas A. ; Argos ; Jr. George, Partially or completely encapsulated top electrode of a ferroelectric capacitor.
  50. Evans Thomas A. ; Argos ; Jr. George, Partially or completely encapsulated top electrode of a ferroelectric capacitor.
  51. Zambrano, Raffaele, Process for selectively sealing ferroelectric capacitive elements incorporated in semiconductor integrated non-volatile memory cells.
  52. Whitaker, Mark R.; Greefkes, Kirk, RFID interface and interrupt.
  53. Peng Chien-Hsiung (Blacksburg VA) Desu Seshu B. (Blacksburg VA) Si Jie (Blacksburg VA), Rare earth manganate films made by metalorganic decomposition or metalorganic chemical vapor deposition for nonvolatile.
  54. Shintani Masaki,JPX ; Shigeta Masanobu,JPX ; Nishihata Toshihiko,JPX ; Kurogane Hideo,JPX ; Honma Akira,JPX, Reflection-type display apparatus having antireflection films.
  55. Amanuma Kazushi,JPX, Semiconductor device and method of manufacturing the same.
  56. Hikosaka, Yukinobu; Ozaki, Yasutaka; Takai, Kazuaki, Semiconductor device and method of manufacturing the same.
  57. Kazushi Amanuma JP, Semiconductor device and method of manufacturing the same.
  58. Ishihara, Kazuya, Semiconductor memory device and method of fabricating the same.
  59. Mitarai Shun,JPX ; Ohnishi Shigeo,JPX ; Hara Tohru,JPX, Semiconductor memory device with less characteristic deterioration of dielectric thin film.
  60. Yen, Allen; Hui, Frank Yauchee; Yan, Yifeng Winston, Stacked structure for parallel capacitors and method of fabrication.
  61. Yamanobe, Tomomi, Wiring layer structure for ferroelectric capacitor.
  62. Yamanobe,Tomomi, Wiring layer structure for ferroelectric capacitor.
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