[특허]Mechanical interface wafer container

Mechanical interface wafer container 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B65B-001/04 B65D-085/30
출원번호	US-0248306 (1994-05-24)
발명자 / 주소	Williams Randall S. (Chaska MN) Cheesebrow Nicholas T. (St. Paul MN)
출원인 / 주소	Fluoroware, Inc. (Chaska MN 02)
인용정보	피인용 횟수 : 55 인용 특허 : 0

초록 ▼

A standardized mechanical interface (SMIF) pod for use in conjunction with SMIF systems is disclosed. The pod is utilized for transporting article, such as semiconductor wafers or the like, between locations such as SMIF processing stations. The pod includes a box having an open end and a box door which sealably engages and closes the open end. The box contains a removable carrier which seats on the box door and which has an open side for insertion and removal of the articles. The pod features a latching mechanism in the box door utilizing a star wheel with tips that rotate and extend out of slots in the box door into slots in the interior sidewalls of the box. The tips then move vertically downward to sealingly engage the box door to the box. The star wheel embraces a concentric cammed hub having angled cam surfaces engaged by cam follower pins extending radially inward from the star wheel. The star wheel is configured and positioned in the box door such that partial rotation rotates the tips from the interior of the box to extend outwardly of the slots. At the point of extension a stop further limits the rotation of the star wheel causing the cam followers to follow the cam surface as the cammed hub is further rotated moving the star wheel downwardly, thus causing engagement of the tips with the slots in the box and moving the box door downwardly to sealingly engage the box door with the box. A pair of one-way valves provide for purging of the interior of the pod. An alignment arm swingably pivots from the top inside of the box. The alignment arm has an engagement finger that engages the top of the carrier and a retaining portion that extends in from of the open side of the carrier. As the wafer carrier with the box door is raised into the box the finger engages the top of the carrier to swing the retaining portion in front of the open side of the carrier to hold the wafers in place. The alignment arm swings by way of a flexible portion eliminating scraping or rubbing of parts.

대표청구항 ▼

A transportable container for sealingly enclosing articles in a substantially particle free environment and for interfacing with processing equipment, the container comprising: (a) a box having an open interior, an open end, and a plurality of inwardly facing recesses adjacent to the open end; (b) a removable box door closing the open end, the box door having a housing, the housing having a plurality of sidewalls, the sidewalls having a plurality of slots positioned to be adjacent to the recesses in the box, the housing having an open interior; and, (c) a plate rotatably mounted in the open interior of the box door housing, the plate having a plurality of latching tips peripherally located on the plate, the plate configured such that each tip is positioned at a slot and such that as the plate is rotated the tips rotate outwardly through the slots and into the recesses in the box. A transportable container for interfacing with processing equipment and for sealingly enclosing wafers in a substantially particle free environment, the container comprising: (a) a box, the box having an open interior and an open end; (b) a box door sized to be received by the box and to close the open end, the box door having a surface facing the interior, the surface having a wafer carrier receiving region; (c) a wafer carrier, the carrier sized to be received by the receiving region on the interior facing surface of the box door, the carrier having an open side for receiving wafers; and (d) an alignment arm having opposing ends with a finger on one end and a retaining arm portion on the opposing end, the alignment arm swingably attached to the box only intermediate the retaining arm portion and the finger, the retaining arm portion extending across the open end of the box, whereby as the box door with the wafer carrier is received by the box the finger engages the wafer carrier and thereby swings the retaining arm portion into an alignment and retaining position.

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William J. Fosnight ; Anthony C. Bonora ; Raymond S. Martin ; Perry Peterson, SMIF pod including independently supported wafer cassette.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
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안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

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