[특허]Non-contact optical techniques for measuring surface conditions

Non-contact optical techniques for measuring surface conditions 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01B-011/06 G01J-005/06 H01L-021/66
출원번호	US-0180641 (1994-01-12)
발명자 / 주소	Schietinger Charles W. (Portland OR) Adams Bruce E. (Portland OR)
출원인 / 주소	Luxtron Corporation (Santa Clara CA 02)
인용정보	피인용 횟수 : 59 인용 특허 : 0

초록 ▼

Thermal, optical, physical and chemical characteristics of a substrate (11) surface are determined with non-contact optical techniques that include illuminating (23) the surface with radiation having a ripple intensity characteristic (51), and then measuring the combined intensities (53) of that radiation after modification by the substrate surface and radiation emitted from the surface. Precise determinations of emissivity, reflectivity, temperature, changing surface composition, the existence of any layer formed on the surface and its thickness are all possible from this measurement. They may be made in situ and substantially in real time, thus allowing the measurement to control (39, 41) various processes of treating a substrate surface. This has significant applicability to semiconductor wafer processing and metal processing.

대표청구항 ▼

A method of determining a characteristic of a layer of one material on a surface of another material, comprising the steps of: directing continuous electromagnetic radiation toward the layer and surface in a manner to be modified thereby, said radiation including a given wavelength range and having a d.c. intensity level with a periodic a.c. intensity ripple superimposed thereon, detecting a combined level of the intensity within the given wavelength range of the directed electromagnetic radiation after being modified by the layer and the intensity of electromagnetic radiation within said wavelength range that is emitted by the layer and surface to thereby generate a first electrical signal having a first d.c. component with a periodic a.c. intensity ripple component of a first magnitude superimposed thereon, generating a second electrical signal corresponding to the directed electromagnetic radiation, said second electrical signal having a second d.c. component with a periodic a.c. ripple component of a second magnitude superimposed thereon, and determining the characteristic of the layer from at least the first and second magnitudes of the ripple components of the respective first and second electrical signals.

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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연합인증

Non-contact optical techniques for measuring surface conditions 원문보기

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Non-contact optical techniques for measuring surface conditions 원문보기

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