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Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier tr 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-021/00
출원번호 US-0329110 (1994-10-25)
발명자 / 주소
  • Hendler Lawrence (Cupertino CA) Watts Michael P. C. (Portola Valley CA)
출원인 / 주소
  • Pixel Systems, Inc. (Cupertino CA 02)
인용정보 피인용 횟수 : 55  인용 특허 : 0

초록 ▼

High speed pattern and defect detection in flat panel displays, integrated circuits, photo mask reticles, CRT color masks, printed circuit boards, and any other patterned devices, regular or irregular, uses analog optical computing. Using appropriate illumination and optics, the Fourier transform of

대표청구항 ▼

A detector comprising: Fourier transform optics positioned to form a Fourier transform pattern of light from a device under test; a spatial separator positioned to receive light from the Fourier transform optics, the spatial separator having a plurality of regions including a first region which rece

이 특허를 인용한 특허 (55)

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