[특허]A-dual band IR sensor having two monolithically integrated staring detector arrays for simultaneous, coincident image re

A-dual band IR sensor having two monolithically integrated staring detector arrays for simultaneous, coincident image re 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-025/065 H01L-027/146 H01L-031/0296 G01J-005/22
출원번호	US-0253716 (1994-06-03)
발명자 / 주소	Yanka Robert W. (Liverpool NY) Noble Milton L. (Liverpool NY)
출원인 / 주소	Martin Marietta Corporation (Syracuse NY 02)
인용정보	피인용 횟수 : 45 인용 특허 : 0

초록 ▼

A compact dual band IR focal plane assembly provides simultaneous, coincident two-dimensional image readout. It includes a MIS-CID MWIR detector array formed in an epitaxial layer grown by the MBE process on the (111B) front face of an IR transparent crystalline first substrate, the pixels thereof forming LWIR transparent windows, with opaque connections thereto lying in aisles framing the windows, and a PV diode LWIR detector array formed in an epitaxial layer grown by the LPE process on the (111A) back face of the substrate, the LWIR pixels being aligned with the transparent MWIR pixels. An MWIR MUX is provided on an IR transparent silicon second substrate arranged in front of the first substrate. The opaque switch portion of the MWIR MUX is arrayed with apertures and aisles in alignment with the windows and aisles of the MIS-CID array. An LWIR MUX is provided on a third substrate bonded to the LWIR detector array beyond the image paths, the MWIR and LWIR MUXes providing simultaneous, coincident image readout.

대표청구항 ▼

In a two-dimensional IR staring array in which pixel-registered, medium wave and long wave infrared (MWIR, LWIR) images of the same object field are simultaneously readout, a focal plane assembly comprising: (A) an LWIR transmissive crystalline first substrate having a first face oriented for front side illumination and a second face oriented for back side illumination, (B) an integrated MWIR radiation sensitive metal insulator semiconductor (MIS) charge injection device (CID) detector array formed on said first face for sensing a two-dimensional image comprising: (a) a first semiconductor layer of a material suitable for MWIR radiation sensing and absorption epitaxially grown on said first face, and (b) an insulated gate structure formed on said first semiconductor layer comprising an IR transparent metallic gate layer patterned to form a two dimensional array of IR transmissive window shaped pixels, and IR opaque metallic conductors for connection to individual pixels lying principally in aisles framing said window shaped pixels, said first semiconductor layer and said gate structure forming an array of MWIR sensing MIS-CID pixels distributed within the boundary of said image, each pixel sensing and absorbing MWIR radiation and constituting an LWIR radiation transmissive window, (c) an integrated multiplexer (MUX) for said MWIR detector array comprising switch, preamplifier, multiplexer, and shift register portions, disposed on the back face of a IR transmissive second substrate disposed in front of said first substrate, the IR opaque parts of said switch portion being apertured and laid out in aisles framing said apertures, said aperture and aisles on said second substrate being in registry with said pixels and aisles on said first substrate; the preamplifier, multiplexer, and shift register portions of said MWIR MUX being displaced outside said image boundary, (C) opaque conductive means aligned with said aisles interconnecting the individual pixels of said MWIR detector array to said MWIR MUX to enable image readout, (D) an integrated two-dimensional, LWIR radiation sensitive, photovoltaic (PV) diode array coextensive with said MWIR detector array comprising a second semiconductor layer epitaxially grown on said second face for monolithic integration with said MWIR detector array, said second semiconductor layer being of a material suitable for LWIR radiation sensing; and a diffusion on the back face of said second semiconductor layer patterned to provide an array of LWIR radiation sensitive PV diode pixels, the LWIR sensitive regions of said LWIR pixels being aligned with said LWIR radiation transmissive windows of said MWIR detector array to provide image radiation to each pixel of said LWIR detector array in registration with the image provided to each pixel of said MWIR detector array, and (E) an integrated LWIR MUX disposed on a third substrate mechanically attached to the back face of said first substrate and electrically connected to individual PV diodes of said LWIR sensitive detector array to enable an LWIR radiation image to be readout simultaneously with and in pixel-registration to the MWIR radiation image.

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A-dual band IR sensor having two monolithically integrated staring detector arrays for simultaneous, coincident image re 원문보기

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