[특허]Electrostatic chuck having a grooved surface

Electrostatic chuck having a grooved surface 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H02N-013/00 B23Q-003/15
출원번호	US-0390148 (1995-02-21)
발명자 / 주소	Steger Robert J. (Cupertino CA)
출원인 / 주소	Applied Materials, Inc. (Santa Clara CA 02)
인용정보	피인용 횟수 : 71 인용 특허 : 0

초록 ▼

An electrostatic chuck (113) having grooves (130, 132, 134) to uniformly distribute a heat transfer medium, e.g., a gas, and a method of fabricating such an electrostatic chuck. Specifically, a grooved layer (112) is formed upon a surface (110) of a conventional chuck body (111). Typically, a conventional chuck body contains a substrate (100) having one or more electrodes (104, 106) deposited thereupon and a first layer (108), typically formed of an insulating material, disposed over the electrodes and a surface of the substrate which supports the electrodes. A second layer (112), typically formed of an insulating material, is formed by screen printing a paste of insulating material over a surface of the first layer. The paste is applied in a pattern which includes at least one gap. After curing the paste into a hard layer, the second layer contains the gap or gaps defined by the screen pattern. The combination of the surface of the first layer and the gaps in the second layer define a grooved surface pattern. The second layer supports a workpiece (122) during subsequent workpiece processing. A hole (216) through the substrate and the first layer provides a portal through which a gas can be pumped into the grooves. With this arrangement, the medium promotes substantially uniform heat exchange between the workpiece and the electrostatic chuck.

대표청구항 ▼

A method of fabricating an electrostatic chuck for retaining a workpiece, wherein said chuck contains a grooved surface, said method comprising the steps of: forming, upon a surface of a chuck body, a layer of an insulating material in a predetermined pattern having a lateral gap; hardening the layer to form an insulating layer having a groove defined by said gap and said surface of said chuck body. An electrostatic chuck for retaining a workpiece comprising: a chuck body having a surface; a layer of an insulating material disposed over said surface of said chuck body; and said layer having a lateral gap in a surface of said layer such that said gap defines sides of a groove and said surface of said chuck body defines a bottom of said groove, said surface of said layer is adapted to support said workpiece.

이 특허를 인용한 특허 (71)

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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연합인증

Electrostatic chuck having a grooved surface 원문보기

초록 ▼

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Electrostatic chuck having a grooved surface 원문보기

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연구과제 타임라인

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