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Apparatus for blending and controlling the concentration of a liquid chemical in a diluent liquid 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01F-015/02
  • G05D-011/08
출원번호 US-0355671 (1994-12-14)
발명자 / 주소
  • O\Dougherty Kevin T. (Minneapolis MN) Sandquist Alden W. (Watertown MN)
출원인 / 주소
  • FSI International, Inc. (Chaska MN 02)
인용정보 피인용 횟수 : 62  인용 특허 : 0

초록

Apparatus blending a diluent liquid, i.e., DI water, with a chemical concentrate, a flow duct and mixing tank forming a closed loop for mixing; a pair of flow duct portions each having a conductivity sensor inductively sensing chemical concentration in the blended liquid; a comparator for comparing

대표청구항

Apparatus for producing a blended liquid containing a predetermined concentration of liquid chemical in a diluent liquid, comprising a storage and mixing container to receive the diluent liquid and to store such blended liquid, a flow duct comprising a receiving end portion connected with said mixin

이 특허를 인용한 특허 (62)

  1. Bellafiore, Louis; Sanderson, James; Walker, John, Accurate blending module and method.
  2. Bellafiore,Louis; Sanderson,James, Accurate blending module and method.
  3. Obeng Yaw S. ; Schultz Laurence D., Apparatus and method for continuous delivery and conditioning of a polishing slurry.
  4. Tewell Stanley, Apparatus and method for controlled chemical blending.
  5. Auad, Rogerio Batista, Apparatus and process for the continuous preparation of a fluid, utilizing a fluid recycling means including a buffer.
  6. Husher, Frederick K., Apparatus for controllably mixing and delivering diluted solution.
  7. Suzuki Takao,JPX ; Kojoh Naomiki,JPX ; Takahashi Yoshiyasu,JPX, Apparatus for diluting a solution and method for the same.
  8. Fukuizumi,Masataka; Osuda,Hiroshi; Matoba,Toru; Nakamura,Takeshi, Apparatus for measuring characteristics of chemical solution, chemical solution supply apparatus, and method for measuring concentration of chemical solution.
  9. Lins, Claudio L. K., Apparatus for mixing and dispensing powder.
  10. Pozniak Peter M. ; Roberts Benjamin R. ; Jansen Frank, Apparatus for producing liquid mixture having predetermined concentration of a specific component.
  11. Hyatt, Robert Rinehart; Hyatt, George William, Apparatus for storing, mixing, metering, and injecting polymeric slurries into pipelines.
  12. Anderson,Gary R.; Fowler,Matt, Batch mixing method with first derivative homogeneity monitoring.
  13. Anderson,Gary R.; Fowler,Matt, Batch mixing method with standard deviation homogeneity monitoring.
  14. O'Dougherty Kevin T. ; Lemke Travis A. ; Grant Donald C., Chemical blending system with titrator control.
  15. Fukui, Akira, Chemical concentration control device for semiconductor processing apparatus.
  16. Munroe James Platt ; Samsal Richard Linton ; Greenawald Bruce Herman, Chemical generator with controlled mixing and concentration feedback and adjustment.
  17. Simpson,Michael B.; Woodley,George V.; Anderson,Gary R., Chemical mixing apparatus.
  18. Nitta, Takahisa; Miki, Nobuhiro; Yamaguchi, Yoshiaki, Chemical supply system.
  19. Hwang Kyung-seuk,KRX ; Kwag Gyu-hwan,KRX ; Yun Young-hwan,KRX, Circulation system for supplying chemical for manufacturing semiconductor devices and circulating method thereof.
  20. Miller, Greg P.; Johnson, Michael R.; O'Connor, John J.; Joseph, Martin, Conductivity control of water content in solvent strip baths.
  21. Lemke, Travis A., Conductivity feedback control system for slurry bending.
  22. Blehaut Jean,FRX ; Nicoud Roger-Marc,FRX, Constituent separation system.
  23. Gerken, David, Control of fluid conditions in bulk fluid distribution systems.
  24. Nakagawa, Toshimoto; Ogawa, Shu; Morita, Satoru; Kikukawa, Makoto; Hozan, Takahiro, Developer producing equipment and method.
  25. Woelk, Egbert; DiCarlo, Ronald L., Evaporation vessel apparatus and method.
  26. Lim, Gregory; Francis, Aaron; Williams, Kenneth; Mariserla, Sandeep, Ex-situ cleaning assembly.
  27. Lim, Gregory; Francis, Aaron; Williams, Kenneth, In-situ cleaning assembly.
  28. Schell Daniel, Liquid transfer system.
  29. Schell Daniel, Liquid transfer system.
  30. Kelekar, Rajesh; Verma, Gaurav; Weiner, Kurt, Maintaining flow rate of a fluid.
  31. Rudick, Arthur G., Method and apparatus for providing a selectable beverage.
  32. Edwards, David Paul, Method and apparatus for recycling process fluids.
  33. Rudick, Arthur G., Method and apparatuses for providing a selectable beverage.
  34. Rudick, Arthur G., Method and apparatuses for providing a selectable beverage.
  35. Rudick, Arthur G., Method and apparatuses for providing a selectable beverage.
  36. Lambert ; Sr. Raymond E., Method for continuously treating particulate material in a slurry in a high temperature and high pressure chamber emplo.
  37. Peltzer Charles T., Method for manufacturing a system for mixing fluids.
  38. Chamberlain, Craig S.; Feyma, Dean E.; Heilig, Steven J.; Yorkgitis, Elaine M., Method for measuring stress levels in polymeric compositions.
  39. Pozniak Peter M. ; Roberts Benjamin R. ; Jansen Frank, Method for producing a liquid mixture having a predetermined concentration of a specified component.
  40. Matsumoto, Koji; Kanzaki, Shuji, Method for producing particulate water absorbing agent containing water absorbent resin as main component.
  41. Inagaki, Yasuhito, Method for recycling waste sulfuric acid.
  42. Smith,Richard Lee, Mobile decontamination unit.
  43. Bellafiore, Louis; Sanderson, James, Multi-stage accurate blending system and method.
  44. Fittkau, Jens; Seiwert, Johannes; Gottschalk, Christiane, Ozonated water flow and concentration control apparatus and method.
  45. Brett A. Mayes, Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers.
  46. Mayes, Brett A., Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers.
  47. Mayes, Brett A., Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers.
  48. Cosman, Jeffrey M.; Parker, Bruce; Thompson, Douglas A.; Grandbois, Keith; Walker, Barry Scott; Mullins, Marshall, Process and dispensing system for preparing liquid concentrates for plastics.
  49. Fanjat, Norbert; Urquart, Karl J.; Soulet, Axel; Langellier, Laurent, Reclaim function for semiconductor processing system.
  50. Freud Paul J. ; Dixon Glenn W., Sampling and diluting system for particle size distribution measurement.
  51. Pozniak Peter M. ; Roberts Benjamin R. ; Trang Duy Khanh, Slurry mixing apparatus and method.
  52. Hildreth, Clay; Hoerle, Michael; Aksamit, Scott, Solution making system and method.
  53. Schell, Daniel; Prince, Dan C., System and method for accurately blending fluids.
  54. Lambert ; Sr. Raymond E. (7 Heron La. ; P.O. Box 334 Cataumet MA 02534), System and method for continuously treating particulate material in a slurry in a high temperature and high pressure cha.
  55. Hoffman Joe G. ; Clark R. Scot ; Jones ; Jr. Allen H., System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing.
  56. Kim, Ju Won; An, Doo Keun; Choi, Kwang Il; Jung, Pyong Soon; Choi, Yong Nam; Bae, Jeong Yong, System and method for supplying functional water.
  57. Laederich Thierry,FRX ; Dulphy Herve,FRX ; Guarneri Georges,FRX, System for diluting ultrapure chemicals which is intended for the microelectronics industry.
  58. Antonio Retamal BR; Rogerio Batista Auad BR, System for the continuous and automatic production of automotive and other paints capable of handling a plurality of different paints.
  59. Urquhart, Karl J.; Guarneri, Georges; Marc, Jean-Louis; Fanjat, Norbert; Langellier, Laurent; Colin, Christophe, Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system.
  60. Urquhart, Karl J.; Guarneri, Georges; Marc, Jean-Louis; Fanjat, Norbert; Langellier, Laurent; Colin, Christophe, Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system.
  61. Urquhart, Karl J.; Guarneri, Georges; Marc, Jean-Louis; Fanjat, Norbert; Langellier, Laurent; Colin, Christophe, Systems and methods for managing fluids using a liquid ring pump.
  62. Urquhart, Karl J.; Guarneri, Georges; Marc, Jean-Louis; Fanjat, Norbert; Langellier, Laurent; Colin, Christophe, Systems for managing fluids in a processing environment using a liquid ring pump and reclamation system.
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