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Method of micromachining electromagnetically actuated current switches with polyimide reinforcement seals, and switches 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01H-011/00
출원번호 US-0169272 (1993-12-20)
발명자 / 주소
  • Saia Richard J. (Schenectady NY) Ghezzo Mario (Ballston Lake NY) Bagepalli Bharat S. K. (Schenectady NY) Durocher Kevin M. (Waterford NY)
출원인 / 주소
  • General Electric Company (Schenectady NY 02)
인용정보 피인용 횟수 : 65  인용 특허 : 0

초록 ▼

An insulating layer with at least one via is provided over a metal plate. A sacrificial layer is applied over a portion of the insulating layer so that the sacrificial layer extends into the via. A metal bridge having at least one opening is provided over a portion of the sacrificial layer and a por

대표청구항 ▼

A method of fabricating a switch, comprising the steps of: providing an insulating layer over a metal plate, said insulating layer having at least one via extending to said metal plate; providing a sacrificial layer over a portion of said insulating layer so that said sacrificial layer extends confo

이 특허를 인용한 특허 (65)

  1. Sievenpiper,Daniel F.; Schaffner,James H.; Tangonan,Gregory L., Adaptive beam forming antenna system using a tunable impedance surface.
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  2. Sievenpiper, Daniel F.; Hsu, Hui-Pin; Schaffner, James H.; Tangonan, Gregory L., Antenna system for communicating simultaneously with a satellite and a terrestrial system.
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  3. Chow, Lap-Wai; Hsu, Tsung-Yuan; Hyman, Daniel J.; Loo, Robert Y.; Ouyang, Paul; Schaffner, James H.; Schmitz, Adele; Schwartz, Robert N., CMOS-compatible MEM switches and method of making.
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  4. Sievenpiper,Daniel F., Compact tunable antenna.
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  5. Chow, Lap-Wai; Clark, Jr., William M.; Harbison, Gavin J.; Baukus, James P., Conductive channel pseudo block process and circuit to inhibit reverse engineering.
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  6. Chow, Lap-Wai; Clark, Jr., William M.; Harbison, Gavin J.; Baukus, James P., Conductive channel pseudo block process and circuit to inhibit reverse engineering.
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  7. Chow,Lap Wai; Clark, Jr.,William M.; Harbison,Gavin J.; Baukus,James P., Conductive channel pseudo block process and circuit to inhibit reverse engineering.
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  8. Gregoire, Daniel J.; Colburn, Joseph S., Conformal antennas for mitigation of structural blockage.
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  9. Gregoire, Daniel J., Conformal surface wave feed.
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  10. Naeher Ulrich (Munich DEX) Bertagnolli Emmerich (Munich DEX), Corrosion protection for micromechanical metal layers.
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  11. Chow, Lap Wai; Clark, Jr., William M.; Baukus, James P., Covert transformation of transistor properties as a circuit protection method.
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  12. Chow,Lap Wai; Clark, Jr.,William M.; Baukus,James P., Covert transformation of transistor properties as a circuit protection method.
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  13. Lai, Anthony; Colburn, Joseph S., Electrically tunable surface impedance structure with suppressed backward wave.
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  14. Steeneken, Peter G.; Van Beek, Jozef Thomas Martinus; Rijks, Theodoor, Electronic device.
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  15. Sievenpiper, Daniel; Hsu, Tsung-Yuan; Wu, Shin-Tson; Pepper, David M., Electronically tunable reflector.
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  16. Daniel Sievenpiper ; Jar Jar Lee ; Stan Livingston, End-fire antenna or array on surface with tunable impedance.
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  17. Deconde, Keith T.; Ganapathi, Srinivasan K.; Gluck, Randolph S.; Hovey, Steve H.; Prakash, Shiva; Stoessel, Christopher, Fingerprint sensors using membrane switch arrays.
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  18. Clark, Jr., William M.; Baukus, James P.; Chow, Lap-Wai, Implanted hidden interconnections in a semiconductor device for preventing reverse engineering.
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  19. Clark, Jr.,William M.; Baukus,James P.; Chow,Lap Wai, Implanted hidden interconnections in a semiconductor device for preventing reverse engineering.
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  20. Chow, Lap Wai; Clark, Jr., William M.; Baukus, James P.; Harbison, Gavin J., Integrated circuit modification using well implants.
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  21. Chow, Lap-Wai; Clark, Jr., William M.; Baukus, James P; Harbison, Gavin J., Integrated circuit modification using well implants.
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  22. Baukus, James P.; Chow, Lap-Wai; Clark, Jr., William M., Integrated circuit structure with programmable connector/isolator.
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  23. Chow, Lap-Wai; Clark, Jr., William M.; Baukus, James P., Integrated circuit with reverse engineering protection.
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  24. Chow,Lap Wai; Clark, Jr.,William M.; Baukus,James P., Integrated circuit with reverse engineering protection.
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  25. Chow,Lap Wai; Baukus,James P.; Clark, Jr.,William M., Integrated circuits protected against reverse engineering and method for fabricating the same using an apparent metal contact line terminating on field oxide.
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  26. Chow, Lap-Wai; Baukus, James P.; Clark, Jr., William M., Integrated circuits protected against reverse engineering and method for fabricating the same using vias without metal terminations.
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  27. Sievenpiper,Daniel F., Large aperture rectenna based on planar lens structures.
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  28. Sievenpiper,Daniel F., Large aperture rectenna based on planar lens structures.
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  29. Gregoire,Daniel; Massey,Cameron G.; Sievenpiper,Daniel F., Large-scale adaptive surface sensor arrays.
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  30. Gregoire, Daniel J.; Colburn, Joseph S., Low cost, 2D, electronically-steerable, artificial-impedance-surface antenna.
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  31. Sievenpiper, Daniel F.; Schmitz, Adele E.; Schaffner, James H.; Tangonan, Gregory L.; Hsu, Tsung-Yuan; Loo, Robert Y.; Miles, Robert S., Low-cost HDMI-D packaging technique for integrating an efficient reconfigurable antenna array with RF MEMS switches and a high impedance surface.
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  32. Sievenpiper,Daniel F., Meta-element antenna and array.
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  33. Ganapathi, Srinavasan K.; Gluck, Randolph S.; Hovey, Steven H.; Prakash, Shiva, Method and apparatus for pressure sensing.
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  34. DeConde,Keith T; Diamant,Joram; Ganapathi,Srinivasan K.; Pritikin,Joseph J., Method and apparatus for protection of contour sensing devices.
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  35. DeConde,Keith T; Diamant,Joram; Ganapathi,Srinivasan K.; Pritikin,Joseph J., Method and apparatus for protection of contour sensing devices.
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  36. Sievenpiper,Daniel F.; Pikulski,Joseph L.; Schaffner,James H.; Hsu,Tsung Yuan, Method of making a high impedance surface.
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  37. Eldridge, Benjamin N.; Grube, Gary W.; Khandros, Igor Y.; Mathieu, Gaetan L., Microelectronic contact structure.
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  38. Eldridge, Benjamin N.; Grube, Gary W.; Khandros, Igor Y.; Mathieu, Gaetan L., Microelectronic contact structure and method of making same.
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  39. Hans Diem CH; Werner Johler CH; Werner Kalin CH; Urs Korrodi CH, Miniaturized flat spool relay.
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  40. Sievenpiper, Daniel F.; Pikulski, Joseph L.; Schaffner, James H.; Hsu, Tsung-Yuan, Molded high impedance surface and a method of making same.
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  41. Sievenpiper, Daniel F., Multiband tunable impedance surface.
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  42. Baukus, James P.; Chow, Lap-Wai; Clark, Jr., William M., Permanently on transistor implemented using a double polysilicon layer CMOS process with buried contact.
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  43. Baukus, James P.; Chow, Lap-Wai; Clark, Jr., William M., Permanently on transistor implemented using a double polysilicon layer CMOS process with buried contact.
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  44. Daniel Sievenpiper ; Hui-Pin Hsu, Polarization converting radio frequency reflecting surface.
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  45. Eldridge, Benjamin N.; Grube, Gary W.; Khandros, Igor Y.; Mathieu, Gaetan L., Probe card assembly and kit, and methods of making same.
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  46. Benedetto Vigna IT; Ubaldo Mastromatteo IT, Process for manufacturing integrated devices comprising microstructures and associated suspended electrical interconnections.
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  47. Clark, Jr., William M.; Chow, Lap Wai; Harbison, Gavin; Ouyang, Paul, Programmable connection and isolation of active regions in an integrated circuit using ambiguous features to confuse a reverse engineer.
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  48. Clark, Jr., William M.; Chow, Lap Wai; Harbison, Gavin; Ouyang, Paul, Programmable connection and isolation of active regions in an integrated circuit using ambiguous features to confuse a reverse engineer.
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  49. Baukus, James P.; Chow, Lap-Wai; Clark, Jr., William M., Programmable connector/isolator and double polysilicon layer CMOS process with buried contact using the same.
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  50. Schaffner,James H.; Bridges,William B., RF MEMS switch with integrated impedance matching structure.
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  51. Sievenpiper, Daniel; Harvey, Robin, Radio frequency aperture.
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  52. Colburn, Joseph S.; Sievenpiper, Daniel F.; Mehta, Sarabjit, Reflectarray.
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  53. Mark G. Allen ; Sung-Pil Chang ; Jeong-Bong Lee, Robust substrate-based micromachining techniques and their application to micromachined sensors and actuators.
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  54. Sievenpiper,Daniel F., Single-pole multi-throw switch having low parasitic reactance, and an antenna incorporating the same.
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  55. Sievenpiper,Daniel F., Single-pole multi-throw switch having low parasitic reactance, and an antenna incorporating the same.
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  56. Sievenpiper,Daniel F., Steerable leaky wave antenna capable of both forward and backward radiation.
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  57. Chow, Lap-Wai; Clark, Jr., William M.; Harbison, Gavin J.; Ou Yang, Paul, Symmetric non-intrusive and covert technique to render a transistor permanently non-operable.
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  58. Chow,Lap Wai; Clark, Jr.,William M.; Harbison,Gavin J.; Yang,Paul Ou, Symmetric non-intrusive and covert technique to render a transistor permanently non-operable.
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  59. Daniel Sievenpiper ; James H. Schaffner, Textured surface having high electromagnetic impedance in multiple frequency bands.
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  60. Daniel Sievenpiper ; Greg Tangonan ; Robert Y. Loo ; James H. Schaffner, Tunable impedance surface.
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  61. Sievenpiper, Daniel; Harvey, Robin J.; Tangonan, Greg; Loo, Robert Y.; Schaffner, James H., Tunable impedance surface.
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  62. Chow, Lap-Wai; Clark, Jr., William M.; Harbison, Gavin J.; Baukus, James P., Use of silicide block process to camouflage a false transistor.
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  63. Chow, Lap-Wai; Clark, Jr., William M.; Harbison, Gavin J.; Baukus, James P., Use of silicon block process step to camouflage a false transistor.
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  64. Chow,Lap Wai; Clark, Jr.,William M.; Harbison,Gavin J.; Baukus,James P., Use of silicon block process step to camouflage a false transistor.
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  65. Sievenpiper, Daniel, Vivaldi cloverleaf antenna.
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