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Microdevice with ferroelectric for sensing or applying a force 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/82
출원번호 US-0241052 (1994-05-11)
발명자 / 주소
  • Polla Dennis L. (Brooklyn Park MN)
출원인 / 주소
  • Regents of the University of Minnesota (Minneapolis MN 02)
인용정보 피인용 횟수 : 76  인용 특허 : 0

초록 ▼

A micromechanical structure or microactuator based upon the piezoelectric, pyroelectric, and electrostrictive properties of ferroelectric thin film ceramic materials such as PZT with a thickness between 0.1 and 10 micrometers. The thin film ceramic material is sandwiched between first and second ele

대표청구항 ▼

A microdevice formed integral to an integrated circuit chip for generating a force or mechanical movement comprising: a ferroelectric thin film ceramic having a thickness between about 0.1 and 10 micrometers, said thin film presenting a surface upon which said force is generated and being adaptable

이 특허를 인용한 특허 (76)

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