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Dual coaxial magnetic couplers for vacuum chamber robot assembly 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H02K-049/10
  • H02K-007/10
  • B25J-011/00
출원번호 US-0544281 (1995-10-17)
발명자 / 주소
  • Stevens Craig L. (Felton CA)
출원인 / 주소
  • Applied Materials Inc. (Santa Clara CA 02)
인용정보 피인용 횟수 : 14  인용 특허 : 61

초록

A compact assembly of two magnetic couplers for coupling two coaxial angular shaft movements through a vacuum barrier. Each coupler includes two concentric rings of radially oriented magnets, arranged to provide magnetic coupling in a radial direction between corresponding magnets in the rings. A re

대표청구항

A mechanism for driving a first member and a second member, said mechanism comprising: a first magnetic coupler coupled to a first motor and the first member for rotating the first member in response to activation of the first motor; a second magnetic coupler coupled to a second motor and the second

이 특허에 인용된 특허 (61)

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  2. Davis James C. (Carlisle MA) Brooks Norman B. (Carlisle MA), Articulated arm transfer device.
  3. Hardegen E. Brian (Westford MA) Bottomley Todd E. (Swamzey NH) Davis ; Jr. James C. (Carlisle MA), Articulated arm transfer device.
  4. Hendrickson Ruth A. (Lincoln MA), Articulated arm transfer device.
  5. Wurst Karl-Heinz (Korntal-Munchingen DEX), Articulated drive, more particularly for industrial robots.
  6. Makino Hiroshi (1013 Haguro-cho Kofu City ; Yamanashi Prefecture JPX), Assembly robot.
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  10. Gorman Robert H. (Kernersville NC), Drive apparatus for an industrial robot.
  11. Wiedemann Kurt (Augsburg DEX) Schwarz Werner (Augsburg DEX), Drive protection device connectable between two portions of a driven operating device.
  12. Iwasawa Yoshiyuki (Tokyo JPX) Ishida Tsutomu (Tokyo JPX) Harada Hiroshi (Tokyo JPX) Okamoto Kenji (Tokyo JPX) Kobayashi Shintaro (Tokyo JPX) Matsumoto Takashi (Ise JPX) Shinya Tsutomu (Ise JPX) Tanak, Dusttight storage cabinet apparatus for use in clean rooms.
  13. Yamaguchi Ryoji (Tokyo JPX), Electric motor unit.
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  15. Obermann Peter (Erlangen DEX), Frontal magnet coupling with integrated magnetic bearing load relief.
  16. Hutchinson Martin A. (Santa Clara CA), Gate valve for wafer processing system.
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  19. Kopp Norman L. (Caledonia IL), Integral magnetic torque limiting coupling/motor.
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  26. Walker Alan John (3 Argyle St. Dornoch ; Sutherland EN), Magnetic coupling.
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  34. Uehara Akira (Kanagawa JPX) Hijikata Isamu (Kanagawa JPX) Minato Mitsuaki (Kanagawa JPX), Object handling device.
  35. Hartman Emil T. (Detroit MI), Permanent magnet propulsion system.
  36. Bramhall ; Jr. Robert B. (Gloucester MA) Cloutier Richard M. (Salisbury MA), Platen assembly for a vacuum processing system.
  37. Karidis John P. (Ossining NY) McVicker Gerard (Wappingers Falls NY) Pawletko Joseph P. (Endwell NY), Positioning apparatus.
  38. Karidis John P. (Ossining NY) McVicker Gerard (Wappingers Falls NY) Pawletko Joseph P. (Endwell NY), Positioning apparatus and movement sensor.
  39. Ferreira Caio A. (Rockford IL), Radial magnetic coupling.
  40. Takahashi Hiroshi (Tokyo JPX) Takahara Kenichi (Tokyo JPX), Rotating anode X-ray tube.
  41. Bramhall ; Jr. Robert B. (Gloucester MA) Cloutier Richard M. (Salisbury MA) Laber Albert P. (Revere MA) Muka Richard S. (Topsfield MA), Sealing apparatus for a vacuum processing system.
  42. Kakehi Yutaka (Hikari JPX), Semiconductor substrate transport system.
  43. Pieters Ferdinandus A. (Walnut Creek CA), Split magnet drive.
  44. Blake Julian G. (Cambridge MA) Muka Richard S. (Topsfield MA) Younger Peter R. (Newton MA), Sputtering system.
  45. Crabb Richard (Mesa AZ) Robinson McDonald (Paradise Valley AZ) Hawkins Mark R. (Mesa AZ) Goodwin Dennis L. (Tempe AZ) Ferro Armand P. (Scottsdale AZ) deBoer Wiebe B. (Eersel OR NLX) Ozias Albert E. (, Substrate loading apparatus for a CVD process.
  46. Ishida Toshimichi (Hirakata JPX) Suzuki Masaki (Hirakata JPX), Substrate transfer apparatus.
  47. Hirokawa Toshio (Kawasaki JPX) Uchida Norio (Yokohama JPX) Kuwabara Osamu (Yokohama JPX) Kikuiri Nobutaka (Tokyo JPX), Synchrotron radiation apparatus.
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  49. Naka Hirokazu (Iwata JPX) Hayasaka Tadashi (Iwata JPX), Tool attaching device.
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  51. Lowrance Robert B. (Los Gatos CA), Two-axis magnetically coupled robot.
  52. Lowrance Robert B. (Los Gatos CA), Two-axis magnetically coupled robot.
  53. Bederson Benjamin B. (New York) Wallace Richard S. (New York) Schwartz Eric L. (New York NY), Two-dimensional pointing motor.
  54. Weingrtner Ernst (Gelnhausen DEX) Samietz Klaus (Tokyo JPX), Vacuum arc melting and casting furnace with a vacuum chamber and a tilting crucible.
  55. Shekerjian Brian H. (Tempe AZ) Price J. B. (Scottsdale AZ), Vacuum load lock.
  56. Carter, Donald L., Vacuum-to-vacuum entry system apparatus.
  57. Matsushita Yoshinari (Hirakata JPX) Fukumoto Kenji (Hirakata JPX) Takeda Satoshi (Arai JPX), Vertical load-lock reduced-pressure type chemical vapor deposition apparatus.
  58. Chrisos John M. (Beverly MA) Fowler ; Jr. Bertram F. (Danvers MA) Muka Richard S. (Topsfield MA), Wafer handling apparatus.
  59. Christensen Richard G. (Pine Plains NY) Mack Alfred (Poughkeepsie NY), Wafer transfer apparatus.
  60. Tada Keishi (Kanagawa JPX), Wafer transfer device for a semiconductor device fabricating system.
  61. Stark Mark M. (Kamakura JPX) Nakajima Shu (Fujisawa CA JPX) Lachenbruch Roger B. (Sausalito CA), Xenon enhanced plasma etch.

이 특허를 인용한 특허 (14)

  1. Lamb Karl J., Adjustable permanent magnet coupler.
  2. Kehr, Ulrich; Rudischhauser, Jurgen; Dahmen, Jan, Device for positioning components within endoscopic systems.
  3. Obweger, Rainer; Werfel, Frank, Device for treating disc-like article and method for operating same.
  4. McClintock William ; Lowrance Robert B. ; Grunes Howard, Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers.
  5. Lamb Karl J., Permanent magnet coupler with adjustable air gaps.
  6. Albertson, Robert V., Permanent magnets holding disk.
  7. Hatake Kazuhiro,JPX ; Suwa Tatsunori,JPX, Robot for handling.
  8. Hosek, Martin, Robot system with independent arms.
  9. Moura, Jairo T.; Gilchrist, Ulysses; Caveney, Robert T., Sealed robot drive.
  10. Liu, Kai; Hu, Songli; Jiang, Jie, Silicon wafer transportation system.
  11. Takahashi, Eiichi; Fukai, Toshimasa; Tatsumi, Toshinori; Nishikiori, Yuichi; Kitakizaki, Kaoru, Vacuum capacitor.
  12. Takahashi, Eiichi; Fukai, Toshimasa; Tatsumi, Toshinori; Nishikiori, Yuichi; Kitakizaki, Kaoru; Tanimizu, Toru, Vacuum capacitor.
  13. Takahashi, Eiichi; Fukai, Toshimasa; Tatsumi, Toshinori; Nishikiori, Yuichi; Kitakizaki, Kaoru; Tanimizu, Toru, Vacuum capacitor.
  14. Chidambaram, Mahendran; Truong, Quoc; Schock, Jerry; Parker, N. William, Wafer processing system with dual wafer robots capable of asynchronous motion.
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