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Method for manufacturing a semiconductor device using a catalyst 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/20
출원번호 US-0341935 (1994-11-16)
우선권정보 JP-0329761 (1993-12-01)
발명자 / 주소
  • Ohtani Hisashi (Kanagawa JPX) Miyanaga Akiharu (Kanagawa JPX) Zhang Hongyong (Kanagawa JPX) Yamaguchi Naoaki (Kanagawa JPX) Suzuki Atsunori (Kanagawa JPX)
출원인 / 주소
  • Semiconductor Energy Laboratory Co., Ltd. (Kanagawa-ken JPX 03) Sharp Corporation (Osaka JPX 03)
인용정보 피인용 횟수 : 264  인용 특허 : 0

초록

A method for manufacturing a thin film transistor having a crystalline silicon layer as an active layer comprises the steps of disposing a solution containing a catalyst for promoting a crystallization of silicon in contact with an amorphous silicon film, crystallizing the amorphous silicon at a rel

대표청구항

A method for manufacturing a semiconductor device comprising the steps of: disposing a catalyst element for promoting a crystallization of silicon or a compound containing said catalyst element in contact with an amorphous silicon film; crystallizing said amorphous silicon film with said catalyst el

이 특허를 인용한 특허 (264)

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  167. Yamazaki Shunpei,JPX ; Zhang Hongyong,JPX, Semiconductor device and method for forming the same.
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  170. Shoji,Hironobu; Shimomura,Akihisa; Koyama,Masaki, Semiconductor device and method for manufacturing semiconductor device.
  171. Adachi Hiroki,JPX ; Takenouchi Akira,JPX ; Fukada Takeshi,JPX ; Uehara Hiroshi,JPX ; Takemura Yasuhiko,JPX, Semiconductor device and method for manufacturing the same.
  172. Adachi Hiroki,JPX ; Takenouchi Akira,JPX ; Fukada Takeshi,JPX ; Uehara Hiroshi,JPX ; Takemura Yasuhiko,JPX, Semiconductor device and method for manufacturing the same.
  173. Hiroki Adachi JP; Akira Takenouchi JP; Takeshi Fukada JP; Hiroshi Uehara JP; Yasuhiko Takemura JP, Semiconductor device and method for manufacturing the same.
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  175. Miyanaga, Akiharu; Ohtani, Hisashi; Takemura, Yasuhiko, Semiconductor device and method for manufacturing the same.
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  200. Hideto Ohnuma JP; Tosiyuki Agui JP; Akiko Shiba JP, Semiconductor device and method of manufacturing the same.
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  223. Zhang Hongyong,JPX, Semiconductor device having improved crystal orientation.
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  251. Koyama, Jun; Osame, Mitsuaki; Ogata, Yasushi, Signal dividing circuit and semiconductor device.
  252. Koyama,Jun; Osame,Mitsuaki; Ogata,Yasushi, Signal dividing circuit and semiconductor device.
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  254. Yamazaki, Shunpei; Miyanaga, Akiharu; Koyama, Jun; Fukunaga, Takeshi, Thin film semiconductor device and its manufacturing method.
  255. Yamazaki Shunpei,JPX ; Teramoto Satoshi,JPX ; Koyama Jun,JPX ; Ogata Yasushi,JPX ; Hayakawa Masahiko,JPX ; Osame Mitsuaki,JPX ; Ohtani Hisashi,JPX ; Hamatani Toshiji,JPX, Thin film transistor having grain boundaries with segregated oxygen and halogen elements.
  256. Yamazaki Shunpei,JPX ; Teramoto Satoshi,JPX, Thin film type monolithic semiconductor device.
  257. Yamazaki Shunpei,JPX ; Teramoto Satoshi,JPX, Thin film type monolithic semiconductor device.
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  259. Zhang Hongyong,JPX ; Takayama Toru,JPX ; Takemura Yasuhiko,JPX, Thin-film transistor and fabrication method for same.
  260. Ohnuma Hideto,JPX ; Yamazaki Shunpei,JPX, Thin-film transistor and semiconductor device using thin-film transistors.
  261. Ohnuma, Hideto; Yamazaki, Shunpei, Thin-film transistor and semiconductor device using thin-film transistors.
  262. Zhang Hongyong,JPX ; Takayama Toru,JPX ; Takemura Yasuhiko,JPX ; Miyanaga Akiharu,JPX ; Ohtani Hisashi,JPX, Transistor and semiconductor device having columnar crystals.
  263. Zhang, Hongyong; Takayama, Toru; Takemura, Yasuhiko; Miyanaga, Akiharu; Ohtani, Hisashi, Transistor and semiconductor device having columnar crystals.
  264. Nanba Norihiro,JPX, Zoom lens and optical apparatus having the same.
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