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특허 상세정보

Computer-controlled chemical dispensing with alternative operating modes

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) G02D-007/06   
미국특허분류(USC) 73/863 ; 137/113
출원번호 US-0374000 (1995-01-17)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 31  인용 특허 : 0
초록

Liquid chemical supply ampules, commonly called “bubblers”, which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals from which the ampules produce a gas stream which is saturated with the chemicals. An individual ampule will be connected by means of a selectively operable series of transfer valves to two separate chemical bulk supply tanks. The bulk supply tanks can include one fixed a...

대표
청구항

A system for transferring liquid chemicals from a bulk supply thereof to a chemical application station, said system comprising: a) a plurality of pressurized bulk chemical supply tanks; b) a volume sensor associated with each of said bulk chemical supply tanks, said volume sensors being operable to monitor the volume of chemical remaining in each of said bulk chemical supply tanks; c) a chemical supply ampule for receiving chemical from said bulk chemical supply tanks, said ampule being operable to feed chemical to said application station; d) level det...

이 특허를 인용한 특허 피인용횟수: 31

  1. Teff, Daniel J.; Chagolla, John L.. Additives to prevent degradation of cyclic alkene derivatives. USP2012088252704.
  2. Teff, Daniel J.; Chagolla, John L.. Additives to prevent degradation of cyclic alkene derivatives. USP2011017871536.
  3. Teff, Daniel J.; Chagolla, John L.. Additives to prevent degradation of cyclic alkene derivatives. USP2011077985350.
  4. Teff, Daniel J.; Chagolla, John L.. Additives to prevent degradation of cyclic alkene derivatives. USP2011027883639.
  5. Hashimoto Makoto,JPX. Apparatus and method for determining whether to load a workpiece into a working device using stored and updated status flags. USP2000016018688.
  6. Scholz,Christoph; Frank,Christoph; Kopatzki,Eckard. Apparatus for weighing out the remaining quantity of a substance in a storage vessel. USP2007047202423.
  7. Inoue, Takaaki. Automated chemical synthesizer and method for detecting liquid shortages in the same. USP2004056740296.
  8. Blatt, Christopher S.; Pearce, Richard H.; Williams, Graham; Wentworth, III, Edward H.. Automatic refill system for ultra pure or contamination sensitive chemicals. USP2003086604555.
  9. Christopher S. Blatt ; Richard H. Pearce ; Graham Williams GB; Edward H. Wentworth, III. Automatic refill system for ultra pure or contamination sensitive chemicals. USP2002086435224.
  10. Craig M. Noah ; John N. Gregg ; Robert M. Jackson ; Craig Esser. Bulk chemical delivery system. USP2002086435229.
  11. Noah Craig M. ; Gregg John N. ; Jackson Robert M. ; Esser Craig. Bulk chemical delivery system. USP1999095950693.
  12. Birtcher, Charles Michael; Martinez, Martin Castaneda; Steidl, Thomas Andrew; Vivanco, Gil; Silva, David James. Cabinet for chemical delivery with solvent purging. USP2005106953047.
  13. Birtcher,Charles Michael; Martinez,Martin Castaneda; Steidl,Thomas Andrew; Vivanco,Gil; Silva,David James. Cabinet for chemical delivery with solvent purging and removal. USP2008027334595.
  14. Gregg John N. ; Noah Craig M. ; Jackson Robert M.. Chemical delivery system having purge system utilizing multiple purge techniques. USP2001036199599.
  15. Gregg John N. ; Noah Craig M. ; Jackson Robert M.. Chemical delivery system having purge system utilizing multiple purge techniques. USP2001106296025.
  16. Gregg John N. ; Noah Craig M. ; Jackson Robert M.. Chemical delivery system having purge system utilizing multiple purge techniques. USP2001106296026.
  17. John N. Gregg ; Craig M. Noah ; Robert M. Jackson. Chemical delivery system having purge system utilizing multiple purge techniques. USP2002106457494.
  18. Sakamoto, Yutaka; Kano, Tsuneo; Ogawa, Takashi; Matsumura, Hiroshi; Sango, Toshiaki; Itoh, Kiyoto; Otake, Norio. Cylinder cabinet and method of purging remaining gas in the pipe thereof. USP2004036698469.
  19. Bruce G. Bastin ; Luke D. Prouty. Field marking system. USP2002026345772.
  20. Ismail, Husam; Dobizl, Kenneth Thomas; Holzman, Louis Mark; Sharpe, Sonya Shailesh; Kahlhamer, Jason Andrew; Zurbey, Matthew Frank. Liquid out-of-product alarm system and method. USP20180910072962.
  21. Gutteridge Lancelot P.,AUX. Liquor dispensing apparatus. USP2001126332559.
  22. Nguyen Son T. ; Hendrickson Scott. Method and apparatus for generating controlled mixture of organic vapor and inert gas. USP2001116311959.
  23. Kalala, Satish Kumar; Shah, Jitesh Shantilal. Method and system for mobile distribution station. USP20190210196258.
  24. Pomarede, Christophe; Shero, Eric; Verghese, Mohith; Maes, Jan Willem; Wang, Chang-Gong. Methods of vapor deposition with multiple vapor sources. USP2018019873942.
  25. Shock, Ricky Dean. Mobile distribution station having sensor communication lines routed with hoses. USP20181010087065.
  26. Shock, Ricky Dean. Mobile distribution station with additive injector. USP20181210150662.
  27. Pomarede, Christophe; Shero, Eric; Verghese, Mohith; Maes, Jan Willem; Wang, Chang-Gong. Multiple vapor sources for vapor deposition. USP2016019238865.
  28. Johnson Kenneth Alan. Pressure vessel isolation carriage. USP2000116148667.
  29. Mayorga, Steven Gerard; Haas, Mary Kathryn; O'Neill, Mark Leonard; Sinatore, Dino. Process stability of NBDE using substituted phenol stabilizers. USP2012058173213.
  30. Chism, Richard D.; Krell, Andy. Refillable ampoule with purge capability. USP2016059347616.
  31. Akita, Kazuyuki. Sample supply apparatus for simulated moving bed chromatographic device. USP2005056896797.