[특허]Method of positioning an electrooptic probe of an apparatus for the measurement of voltage

Method of positioning an electrooptic probe of an apparatus for the measurement of voltage 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01R-029/12
출원번호	US-0213005 (1994-03-14)
우선권정보	JP-0054225 (1993-03-15)
발명자 / 주소	Takahashi Hironori (Hamamatsu JPX) Aoshima Shinichiro (Hamamatsu JPX) Hirano Isuke (Hamamatsu JPX) Tsuchiya Yutaka (Hamamatsu JPX)
출원인 / 주소	Hamamatsu Photonics K.K. (Hamamatsu JPX 03)
인용정보	피인용 횟수 : 49 인용 특허 : 0

초록 ▼

An method of positioning an E-O probe applied to an apparatus for the measurement of voltage. In the first step, the relative position of the E-O probe against the magnifying optical system in the first condition of being focused the magnifying optical system on the base of the E-O probe, and the focal point difference between the focal plane of the magnifying optical system in the second condition that the E-O probe is substantially out of the optical path for observation of the surface of the device and the focal plane in the first condition are stored. The relative position and the focal point difference are fixed in the apparatus for the measurement of voltage regardless of the device to be measured. Next, in the second step, the focus of the magnifying optical system is adjusted to the observation position of the surface of the device in the second condition, and then in the third step, the magnifying optical system, the E-O probe, and the probe stage are separated from the device by the focal point difference stored in the first step by the Z-axis stage, and in the fourth step, the E-O probe is moved to the relative position of the E-O probe stored in the first step relative to the magnifying optical system by the probe stage.

대표청구항 ▼

A method of positioning an electrooptic (E-O) probe applied to an apparatus for the measurement of voltage, the probe and the apparatus including a magnifying optical system for observing a surface of a device to be measured in focus, an E-O probe, means for producing a laser beam for the measurement of voltage of said device, said laser beam being applied to said device in a state where said E-O probe approximates to said device, a probe stage for moving said E-O probe in a direction of an optical axis of said magnifying optical system against said magnifying optical system, and a Z-axis stage for moving said magnifying optical system, said E-O probe and said probe stage in a direction of the optical axis of said magnifying optical system against said device, said E-O probe being positioned against the surface of said device without contact with the surface of said device, said method of positioning said E-O probe comprising the steps of: storing a first position of said E-O probe stage in a first condition of said magnifying optical system, focusing a base plane of said E-O probe, and calculating and storing a focal point difference between a position of a focal point of said magnifying optical system against said magnifying optical system in a second condition of said E-O probe substantially out of an optical path for observing the surface of said device and a first position of a focal point of said magnifying optical system against said magnifying optical system in said first condition; adjusting the focus of said magnifying optical system to an observation position on said device; separating said magnifying optical system, said E-O probe, and said probe stage from said device by said focal point difference by said Z-axis stage; and setting said probe stage in said first position.

이 특허를 인용한 특허 (49)

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
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연합인증

Method of positioning an electrooptic probe of an apparatus for the measurement of voltage 원문보기

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Method of positioning an electrooptic probe of an apparatus for the measurement of voltage 원문보기

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이 특허를 인용한 특허 (49)

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