초록 ▼

A cone-shaped bubbler for use with solid metal organic source material used in metal organic chemical vapor phase deposition systems, and a method of producing carrying gas saturated with source material that is injected into such systems. The bubbler comprises a sealed container having a slanted wa

A cone-shaped bubbler for use with solid metal organic source material used in metal organic chemical vapor phase deposition systems, and a method of producing carrying gas saturated with source material that is injected into such systems. The bubbler comprises a sealed container having a slanted wall with an inverted cone-shaped cross section. Solid metal organic source material is disposed in the container. A heat bath surrounds the sealed container. A carrying gas inlet is disposed adjacent the top of the container. Carrying gas is injected in a tangential direction relative to the source material, and a whirlpool effect is generated by the tangential gas flow that imparts a centrifugal force to gas molecules, pushing the source material against the wall to promote heat flow from the heat bath to sustain high rate sublimation. A gas outlet is disposed adjacent the bottom of the container. Once source material lining the slanted inner wall is removed, gravitational forces cause source material to refill the empty space, reducing channel formation and preventing thermal isolation of the source material at the center of the bubbler. The method comprises providing a sealed container with a slanted wall having an inverted cone-shaped cross section, disposing solid metal organic source material in the container, heating the sealed container, injecting a carrying gas adjacent the top of the container so that carrying gas is injected in a tangential direction relative to the solid source material, and removing saturated carrying gas from a gas outlet disposed adjacent the bottom of the container.

대표청구항 ▼

A method of producing a carrying gas saturated with source material that is injected into an epitaxial reactor, said method comprising the steps of: providing a sealed container comprising a slanted side wall having an inverted cone-shaped cross section; disposing solid metal organic source material

A method of producing a carrying gas saturated with source material that is injected into an epitaxial reactor, said method comprising the steps of: providing a sealed container comprising a slanted side wall having an inverted cone-shaped cross section; disposing solid metal organic source material in the sealed container; heating the sealed container; injecting a carrying gas into the inverted cone-shaped container adjacent the top thereof so that carrying gas is injected in a tangential direction relative to the solid source material, and wherein a whirlpool effect is generated by the tangential gas flow that imparts a centrifugal force to gas molecules thereof, pushing the source material against the wall of the bubbler to promote heat flow from the heat bath to sustain high rate sublimation; and removing saturated carrying gas from a gas outlet disposed adjacent the bottom of the inverted cone-shaped container; whereby gravitational forces cause source material to refill empty spaces, thus reducing channel formation and preventing thermal isolation of the source material at the center of the bubbler.