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A leak detecting apparatus using a compound turbo-molecular pump has an analyzer tube, an auxiliary vacuum pump such as a rotary pump connected to the analyzer tube by means of a passage with a compound turbo-molecular pump and a fore valve in between. An exhaust passage extends from a test port to

A leak detecting apparatus using a compound turbo-molecular pump has an analyzer tube, an auxiliary vacuum pump such as a rotary pump connected to the analyzer tube by means of a passage with a compound turbo-molecular pump and a fore valve in between. An exhaust passage extends from a test port to be connected to an object of inspection. The exhaust passage is branched into a plurality of branched passages and each of the branched passages is connected to a position of different compression ratio of the compound turbo-molecular pump. A gate valve is disposed in each of the branched passages. There is connected to the exhaust passage a vacuum gauge which is in communication with each of the gate valves via a controller such that the gate valves are sequentially opened and closed by a signal from the controller in accordance with a change in pressure to be detected by the vacuum gauge.

대표청구항 ▼

A leak detecting apparatus for connection to an object of inspection using a compound turbo-molecular vacuum pump having a plurality of ports corresponding to a plurality of positions with different compression ratios, comprising: an analyzer tube; an auxiliary vacuum pump such as a rotary pump conn

A leak detecting apparatus for connection to an object of inspection using a compound turbo-molecular vacuum pump having a plurality of ports corresponding to a plurality of positions with different compression ratios, comprising: an analyzer tube; an auxiliary vacuum pump such as a rotary pump connected to said analyzer tube by means of a passage via a compound turbo-molecular vacuum pump and a fore valve in between, said auxiliary vacuum pump being capable of changeover in rotation speed; an exhaust passage extending from a test port to be connected to an object of inspection; and a vacuum gauge connected to said exhaust passage, wherein said exhaust passage forms a manifold system that is branched into three passages of first branched passage, a second branched passage and a third branched passage; a gate valve which is disposed in each of said branched passages, wherein said first branched passage is connected to a position of small compression ratio of said compound turbo-molecular pump, said third branched passage is connected to a position of largest compression ratio of said compound turbo-molecular pump, said second branched passage is connected to a position of an intermediate compression ratio, wherein said fore-valve and manifold system of three branched passages with three gate valves is operated such that only said third branched passage is opened when a pressure detected by said vacuum gauge is in a high pressure range, that only said second branched passage is opened when the pressure is in an intermediate pressure range, and that only said first branched passage is opened when the pressure is in a low pressure range.