초록 ▼

This invention incorporates micro-machining fabrication techniques to achieve practical electrostatic actuation forces over a length change of the order of 20 to 50 percent. It constitutes an improvement over the prior art by virtue of array designs which yield a more versatile and stronger actuator

This invention incorporates micro-machining fabrication techniques to achieve practical electrostatic actuation forces over a length change of the order of 20 to 50 percent. It constitutes an improvement over the prior art by virtue of array designs which yield a more versatile and stronger actuator. One basic design utilizes diamond-shaped attractive elements to transmit transverse forces for longitudinal, two-way actuation. Another basic design features interlocking, longitudinally attractive elements to achieve longitudinal, two-way actuation. Other improvements include means for locking the actuator at an arbitrary displacement as well as means for amplification of either the actuation force or length change.

대표청구항 ▼

An electromechanical microactuator comprising: a plurality of beam frames arranged in an array which has a width and a height, wherein said beam frames extend laterally to form rows across said width of said array, a plurality of force elements of electrostatic nature arranged in an array, positione

An electromechanical microactuator comprising: a plurality of beam frames arranged in an array which has a width and a height, wherein said beam frames extend laterally to form rows across said width of said array, a plurality of force elements of electrostatic nature arranged in an array, positioned between said beam frames, and acting to force said beam frames to move apart due to an attractive electrostatic force to increase said height of said array and to move together due to an attractive electrostatic force to decrease said height of said array, a wiring system including switching means located on said beam frames and on said force elements for distribution of electrical signals to activate said force elements.