초록 ▼

A polishing pad comprises a carrier and layer of a non-porous thermoplastic polymer secured to a surface thereof and containing a mass of discrete abrasive particles, comprising diamond or cubic boron nitride, uniformly dispersed therein. The abrasive particles have a particle size of up to 500 micr

A polishing pad comprises a carrier and layer of a non-porous thermoplastic polymer secured to a surface thereof and containing a mass of discrete abrasive particles, comprising diamond or cubic boron nitride, uniformly dispersed therein. The abrasive particles have a particle size of up to 500 microns and are present in the layer in a concentration of up to 30 volume percent. The layer presents an abrasive polishing surface. The abrasive layer may also comprise a plurality of spaced strips secured to a surface of the carrier and each strip presents an abrasive polishing surface.

대표청구항 ▼

A polishing pad comprising a carrier having major surfaces on opposite sides thereof, said major surfaces having longitudinal edges, and at least one of said major surfaces having an abrasive layer structure secured thereto, said abrasive layer structure comprising a plurality of elongate strips arr

A polishing pad comprising a carrier having major surfaces on opposite sides thereof, said major surfaces having longitudinal edges, and at least one of said major surfaces having an abrasive layer structure secured thereto, said abrasive layer structure comprising a plurality of elongate strips arranged to extend generally transversely to the longitudinal edges of said at least one major surface in spaced relationship to each other so as to form regions of empty interspaces therebetween, depending pin members being formed on a surface of each of said elongate strips facing said at least one major surface and being clampingly engaged in complementary apertures formed in said at least one major surface so as to constitute a unitary structure with said carrier; a base member of said polishing pad having a surface mounting said unitary structure comprising said abrasive layer structure and said carrier, said carrier having a plurality of elongate pin members extending into complementary holes formed in a surface of said base member facing a surface of said carrier opposite the surface of said carrier mounting said plurality of elongate strips, whereby said unitary structure of said abrasive layer of strips and barrier are conjointly detachable from said base member and replaceable by another said unitary structure.