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Subtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatus 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05C-013/02
출원번호 US-0476052 (1995-06-07)
우선권정보 JP-0356752 (1992-12-21); JP-0151160 (1993-05-27)
발명자 / 주소
  • Ueyama Tsutomu (Kyoto JPX) Adachi Hideki (Kyoto JPX) Matsumura Yoshio (Hikone JPX) Tanaka Yasuhide (Kyoto JPX)
출원인 / 주소
  • Dainippon Screen Mfg. Co., Ltd. (JPX 03)
인용정보 피인용 횟수 : 153  인용 특허 : 0

초록

A substrate processing apparatus comprises a processing part and a transferring part. In the processing part there are a plurality of stages in which a plurality of processing units are arranged in a row along a horizontal direction and the stages are arranged in a stack vertically. Thus, the proces

대표청구항

A substrate processing apparatus for transferring and processing substrates having plate configurations, said apparatus comprising: processing means including a plurality of processing units for processing each of said substrates serially one by one, each of said processing units processing said sub

이 특허를 인용한 특허 (153)

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