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A CVD apparatus in which a process gas containing a carrier gas and a raw material gas is supplied to a process chamber through a supply line. A first part of the carrier gas is supplied from a primary line through a bubbling line and passed through a raw material liquid to derive the raw material g

A CVD apparatus in which a process gas containing a carrier gas and a raw material gas is supplied to a process chamber through a supply line. A first part of the carrier gas is supplied from a primary line through a bubbling line and passed through a raw material liquid to derive the raw material gas, and then sent to the supply line. A second part of the carrier gas is supplied from the primary line through a bypass line directly to the supply line. Electromagnetic valves are provided on each of the bubbling line and the bypass line and flow sensors are provided on each of the primary line and the supply line. Each flow sensor has a reference element and a heated element, each of which has a thermally-sensitive and electrically conductive wire. Signals from the sensors are supplied to a flow controller, which measures the flow rate of the raw material gas by comparing the measured value with a reference value, and adjusts the opening degrees of the electromagnetic valves on the basis of the comparison.

대표청구항 ▼

An apparatus for treating a substrate while supplying a process chamber with a process gas including first and second gases, comprising: the process chamber; a support member arranged in the process chamber for supporting the substrate; a supply line for supplying the process gas into the process ch

An apparatus for treating a substrate while supplying a process chamber with a process gas including first and second gases, comprising: the process chamber; a support member arranged in the process chamber for supporting the substrate; a supply line for supplying the process gas into the process chamber; a tank for containing a raw material liquid, from which the second gas is derived, and having a vapor space defined therein above the raw material liquid, the supply line being connected to the tank such that it communicates with the vapor space; a primary line for supplying the first gas to the supply line, at least part of the first gas being passed through the raw material liquid in the tank in the form of bubble, thereby to derive the second gas from the raw material liquid and send the second gas to the supply line through the vapor space; a first flow sensor provided on the primary line and comprising a first heated element, the first heated element having a thermally-sensitive and electrically conductive wire, whose resistance varies in accordance with a variation in temperature; a second flow sensor provided on the supply line and comprising a second heated element, the second heated element having a thermally-sensitive and electrically conductive wire, whose resistance varies in accordance with a variation in temperature; and a flow controller connected to the first and second flow sensors for controlling a flow rate of the second gas contained in the process gas, the flow controller generating a first electric signal representing a flow rate of the first gas on the basis of a variation in the resistance of the thermally-sensitive and electrically conductive wire of the first heated element, also generating a second electric signal representing a flow rate of the process gas on the basis of a variation in the resistance of the thermally-sensitive and electrically conductive wire of the second heated element, and calculating a measured value of the flow rate of the second gas on the basis of the difference between the first and second electric signals; wherein the thermally-sensitive and electrically conductive wire of each of the first and second heated elements consists of a self-heating body which generates heat by a voltage supplied thereto; and wherein each of the first and second heated elements further comprises a thermally conductive tube enclosing the thermally-sensitive and electrically conductive wire, the tube being filled with a thermally conductive and an electrically insulating substance, and having an outer surface exposed to a gas to be measured.