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Casting sharpened microminiature tips 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/302
출원번호 US-0970545 (1992-11-02)
발명자 / 주소
  • Akamine Shinya (Stanford CA)
출원인 / 주소
  • The Board of Trustees of the Leland Stanford Junior University (Stanford CA 02)
인용정보 피인용 횟수 : 33  인용 특허 : 0

초록

Sharpened microminiature tips are produced by casting in a silicon/silicon dioxide mold. The silicon dioxide layer is formed by exposing cavities in a single crystal substrate to an oxidizing species at a low temperature. Anomalous oxidation of silicon results in a differential thickness in the sili

대표청구항

In fabricating a microminiature tip assembly having a cantilever terminating in a microminiature tip provided with a free end, the steps of: coating a predetermined surface of a single crystal silicon substrate with a layer of masking material; forming an opening in said masking material layer to ex

이 특허를 인용한 특허 (33)

  1. Shile, Raymond Roger; Duenas, Terrisa; Bussan, John Edward; Athas, Gregory J.; Fragala, Joseph S.; Haaheim, Jason R.; Cruchon-Dupeyrat, Sylvain; Rendlen, Jeffrey R., Active pen nanolithography.
  2. Farnworth,Warren M.; Grief,Malcolm; Sandhu,Gurtej S., Apparatuses configured to engage a conductive pad.
  3. Kang, Weng Poo; Davidson, Jimmy Lee; Kerns, Jr., David V., Diamond diode devices with a diamond microtip emitter.
  4. Davidson,Jimmy L.; Kang,Wang Poo; Kerns,David V.; Howell,Mickey Evans, Diamond triode devices with a diamond microtip emitter.
  5. Nakamoto Masayuki,JPX, Emitter structure of field emission cold-cathode device using synthetic resin substrate.
  6. Farnworth,Warren M.; Grief,Malcolm, Engagement Probes.
  7. Farnworth,Warren M.; Grief,Malcolm; Sandhu,Gurtej S., Engagement probe having a grouping of projecting apexes for engaging a conductive pad.
  8. Ghoshal, Uttam Shyamalindu; Robinson, Errol Wayne, Enhanced interface thermoelectric coolers with all-metals tips.
  9. Li, Xinxin; Yang, Yongliang, Fabrication of a microcantilever microwave probe.
  10. Nakamoto Masayuki,JPX, Field emission cold-cathode device and method of manufacturing the same.
  11. Ghodsian Bahram,CAX ; Parameswaran Ash M.,CAX ; Syrzycki Marek,CAX, Low-cost methods for manufacturing field ionization and emission structures with self-aligned gate electrodes.
  12. Farnworth, Warren M.; Grief, Malcolm; Sandhu, Gurtej S., Method and apparatus for testing semiconductor circuitry for operability and method of forming apparatus for testing semiconductor circuitry for operability.
  13. Farnworth,Warren M.; Grief,Malcolm; Sandhu,Gurtej S., Method and apparatus for testing semiconductor circuitry for operability and method of forming apparatus for testing semiconductor circuitry for operability.
  14. Mehregany Mehran ; Rajan Narayanan ; Zorman Christian A., Method for molding high precision components.
  15. Kirk, Eugenie; Tsujino, Soichiro, Method for producing a field-emitter array with controlled apex sharpness.
  16. Ismail, Salleh, Method of making thin film probe tip for atomic force microscopy.
  17. Matsuda Tetsuo (Poughkeepsie NY) Okumura Katsuya (Poughkeepsie NY), Method of planarizing a semiconductor workpiece surface.
  18. Moldovan, Nicolae, Method to reduce wedge effects in molded trigonal tips.
  19. Popp, Shane M., Methods of interfacing nanomaterials for the monitoring and execution of pharmaceutical manufacturing processes.
  20. Li, Xinxin; Yang, Yongliang, Microcantilever microwave probe.
  21. Kang Weng Poo ; Davidson Jimmy Lee ; Kerns ; Jr. David V., Mold method for forming vacuum field emitters and method for forming diamond emitters.
  22. Raravikar, Nachiket R.; Panat, Rahul, Nanolithographic method of manufacturing an embedded passive device for a microelectronic application, and microelectronic device containing same.
  23. Popp, Shane M., Pharmaceutical dosage forms fabricated with nanomaterials.
  24. Younis, Mohammad, Reliable switch that is triggered by the detection of a specific gas or substance.
  25. Lutter, Stefan, SPM sensor and process for producing it.
  26. Chand, Ami, Scanning probe devices.
  27. Okuyama, Hiroyuki; Doi, Masato; Biwa, Goshi; Oohata, Toyoharu, Semiconductor element.
  28. Okuyama, Hiroyuki; Doi, Masato; Biwa, Goshi; Oohata, Toyoharu, Semiconductor element.
  29. Eldridge, Benjamin N.; Grube, Gary W.; Khandros, Igor Y.; Madsen, Alex; Mathieu, Gaetan L., Sharpened, oriented contact tip structures.
  30. Elrod, Scott A.; Hadimioglu, Babur B.; Steinmetz, David; Wong, Kaiser H., Solid BI-layer structures for use with high viscosity inks in acoustic ink in acoustic ink printing and methods of fabrication.
  31. Babur B. Hadimioglu ; Scott A. Elrod ; David Steinmetz ; Kaiser H. Wong, Solid bi-layer structures for use with high viscosity inks in acoustic ink printing and methods of fabrication.
  32. Singh, Bhanwar; Rangarajan, Bharath; Yedur, Sanjay K., Use of multiple tips on AFM to deconvolve tip effects.
  33. Suzuki Kenichiro,JPX, Vacuum microdevice.
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