초록 ▼

An apparatus for measuring physical properties of micro area which has an object to measure physical properties from a micro area on an atomic scale on the surface of a test sample such as electron spin, nuclear magnetic moment, and nuclear quadrupole moment in high sensitivity, allows the probe 2 o

An apparatus for measuring physical properties of micro area which has an object to measure physical properties from a micro area on an atomic scale on the surface of a test sample such as electron spin, nuclear magnetic moment, and nuclear quadrupole moment in high sensitivity, allows the probe 2 of the atomic force microscope to approach the surface of the test sample 1, applies a magnetic field to the test sample 1 by the magnetic field generation coil 27 and the magnetic paths 22 to 26 and furthermore a high frequency electromagnetic field to the test sample 1 by the coils 16 and 17 respectively, and detects a signal from atoms existing on the surface of the test sample 1 which are resonant with the high frequency electromagnetic field by the probe 2.

대표청구항 ▼

An apparatus for measuring physical properties of a micro area of a sample, said apparatus comprising a probe, a servo circuit for flowing a tunneling current between said probe and the sample and controlling a location of the probe, means for applying a static magnetic field and high frequency elec

An apparatus for measuring physical properties of a micro area of a sample, said apparatus comprising a probe, a servo circuit for flowing a tunneling current between said probe and the sample and controlling a location of the probe, means for applying a static magnetic field and high frequency electric field to the sample so as to generate a resonance signal, and selecting means for selecting alternately one of the tunneling current and resonance signal as a detection object in a gap between the sample and the probe.