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Method of using precision burners for oxidizing halide-free, silicon-containing compounds

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C03B-037/018
출원번호 US-0367047 (1994-12-30)
발명자 / 주소
  • Cain Michael B. (Corning NY) Desorice Robert B. (Corning NY) Kiefer William J. (Horseheads NY) Powers Dale R. (Painted Post NY)
출원인 / 주소
  • Corning Incorporated (Corning NY 02)
인용정보 피인용 횟수 : 35  인용 특허 : 7

초록

A precision burner for oxidizing halide-free, silicon-containing compounds, such as, octamethyl-cyclotetrasiloxane (OMCTS), is provided. The burner includes a subassembly (13) which can be precisely mounted on a burner mounting block (107) through the use of an alignment stub (158), a raised face (1

대표청구항

A method of forming a silicon dioxide containing preform comprising the steps of: (a) providing an elongated starting member; (b) providing a soot-producing burner having a burner face that comprises first, second, third, and fourth gas-emitting regions, the second region surrounding the first regio

이 특허에 인용된 특허 (7)

  1. Kawachi Masao (Mito JPX) Tomaru Satoru (Mito JPX) Edahiro Takao (Mito JPX) Suto Shoichi (Mito JPX), Core torch for fabricating single-mode optical fiber preforms.
  2. Cain Michael B. (Corning NY) Dobbins Michael S. (Corning NY), Method and apparatus for vaporization of liquid reactants.
  3. Andrejco Matthew J. (North Hanover Township ; Burlington County NJ) Potkay Eugene (Hamilton Township ; Mercer County NJ), Method of fabricating a lightguide fiber.
  4. Watanabe Minoru (Kanagawa JPX) Yoshioka Naoki (Kanagawa JPX) Kanamori Hiroo (Kanagawa JPX) Inagaki Nobuo (Ibaraki JPX), Method of fabricating optical fiber preforms.
  5. Powers Dale R. (Painted Post NY), Method of making dry optical waveguides.
  6. Dobbins Michael S. (Wilmington NC) McLay Robert E. (Corning NY), Method of making fused silica by decomposing siloxanes.
  7. Suda Hiroyuki (Mito JPX) Shibata Shuichi (Mito JPX) Nakahara Motohiro (Mito JPX), Method, apparatus and burner for fabricating an optical fiber preform.

이 특허를 인용한 특허 (35)

  1. Lehman, Michael J.; Srikant, Vaidyanathan; Stone, Jeffery S., Apparatus and method of doping silica with fluorine during laydown.
  2. Dawson-Elli, David F.; Fu, Xiaodong; Hawtof, Daniel W.; Kiefer, William J.; Wight, Jr., John F.; Stone, III, John, Burner manifold apparatus for use in a chemical vapor deposition process.
  3. Geremew, Muluwork; Hawtof, Daniel Warren; Noni, Jr., Douglas Miles, Burner modules, methods of forming glass sheets, and glass sheets formed thereby.
  4. Ball, Laura J.; Lindner, Raymond E.; Misra, Mahendra Kumar; Powers, Dale R.; Wasilewski, Michael H., Burners for producing boules of fused silica glass.
  5. Huenermann, Michael, Deposition burner and method for the manufacture thereof, use of the deposition burner and method for the production of a quartz glass body by using the deposition burner.
  6. Johnson, William W, Deposition of high fluorine content silica soot.
  7. Hawtof, Daniel Warren; Noll, Brenton Allen; Vemury, Srinivas, Electrostatic method and apparatus to form low-particulate defect thin glass sheets.
  8. Ishihara, Tomohiro; Yamazaki, Takashi, Glass particle deposit producing method and glass preform producing method.
  9. Collins, Thomas A.; He, Chunhong; Heckle, Christine E.; Lindner, Raymond E.; Wasilewski, Michael H., High heat capacity burners for producing fused silica boules.
  10. Bankaitis, Jonas; Bhagavatula, Venkata Adiseshaiah; Hawtof, Daniel Warren; Li, Xinghua; Merz, Gary Edward; Stone, III, John, Laser sintering system and method for forming high purity, low roughness silica glass.
  11. Choy, Kwang-Leong; Chang, Issac Tsz Hong, Material deposition.
  12. Jeffrey L. Blackwell ; Lisa A. Moore ; Huailiang Wei ; Daniel W. Hawtof, Method and apparatus for combustion-enhanced vaporization.
  13. Huailiang Wei ; Lisa A. Moore ; Jeffery L. Blackwell ; Daniel W. Hawtof, Method and apparatus for making multi-component glass soot.
  14. Oozeki, Nobuo, Method for manufacturing optical fiber preform.
  15. Fogliani, Sabrina; Tregambe, Carlo, Method for producing an optical fiber preform.
  16. Miyasaka, Junko; Koike, Akio; Ogawa, Tomonori; Kawagishi, Masahiro, Method for producing glass body and method for producing optical member for EUV lithography.
  17. Russell, Philip St. John; Mangan, Brian Joseph; Knight, Jonathan Cave; Kilbride, Ian Patrick; Birks, Timothy Adam, Method of drawing microstructured glass optical fibers from a preform, and a preform combined with a connector.
  18. Mark A. McDermott, Method of making planar waveguides using low flow rates of feedstock vapors from a gas and liquid mixture.
  19. Hawtof, Daniel W., Method of producing oxide soot using a burner with a planar burner face.
  20. Matsuo,Koji; Otsuka,Hisatoshi; Shirota,Kazuo; Maida,Shigeru, Method of producing synthetic quartz glass.
  21. Partus Fred Paul, Methods of and systems for vapor delivery control in optical preform manufacture.
  22. Richard S. Priestley ; Daniel R. Sempolinski ; Chunzhe C. Yu, Photolithography method, photolithography mask blanks, and method of making.
  23. Richard S. Priestley ; Daniel R. Sempolinski ; Chunzhe C. Yu, Photolithography method, photolithography mask blanks, and method of making.
  24. Cain Michael B. ; Desorice Robert B. ; Kiefer William J. ; Powers Dale R., Precision burners for oxidizing halide-free silicon-containing compounds.
  25. Ruppert Klaus,DEX ; Steinkohl Anton,DEX, Process and apparatus for the production of a quartz glass blank.
  26. Berkey, George Edward; Moore, Lisa Anne; Yu, Charles Chunzhe, Projection lithography photomask blanks, preforms and method of making.
  27. Berkey George Edward ; Moore Lisa Anne ; Yu Charles Chunzhe, Projection lithography photomask blanks, preforms and methods of making.
  28. Berkey, George Edward; Moore, Lisa Anne; Pierson, Michelle Diane, Projection lithography photomasks and method of making.
  29. Berkey, George Edward; Moore, Lisa Anne; Pierson, Michelle Diane, Projection lithography photomasks and method of making.
  30. Berkey George Edward ; Moore Lisa Anne ; Pierson Michelle Diane, Projection lithography photomasks and methods of making.
  31. Maida, Shigeru; Otsuka, Hisatoshi; Sekizawa, Osamu; Yanagisawa, Naoki, Titania-doped quartz glass and making method.
  32. Lisa A. Moore ; Charlene Smith, Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass.
  33. Moore Lisa A. ; Smith Charlene, Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass.
  34. Moore, Lisa A.; Smith, Charlene M., Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass.
  35. Moore, Lisa A.; Smith, Charlene M., Vacuum ultraviolet trasmitting silicon oxyfluoride lithography glass.
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