Method of using precision burners for oxidizing halide-free, silicon-containing compounds
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C03B-037/018
출원번호
US-0367047
(1994-12-30)
발명자
/ 주소
Cain Michael B. (Corning NY) Desorice Robert B. (Corning NY) Kiefer William J. (Horseheads NY) Powers Dale R. (Painted Post NY)
출원인 / 주소
Corning Incorporated (Corning NY 02)
인용정보
피인용 횟수 :
35인용 특허 :
7
초록▼
A precision burner for oxidizing halide-free, silicon-containing compounds, such as, octamethyl-cyclotetrasiloxane (OMCTS), is provided. The burner includes a subassembly (13) which can be precisely mounted on a burner mounting block (107) through the use of an alignment stub (158), a raised face (1
A precision burner for oxidizing halide-free, silicon-containing compounds, such as, octamethyl-cyclotetrasiloxane (OMCTS), is provided. The burner includes a subassembly (13) which can be precisely mounted on a burner mounting block (107) through the use of an alignment stub (158), a raised face (162) on the burner mounting block (107), and a recess (160) in the back of the subassembly (13). The burner\s face includes four concentric gas-emitting regions: a first central region (36, 90) from which exits a mixture of OMCTS and O2, a second innershield region (38, 92) from which exits N2, a third outershield region (40, 42, 94, 96) from which exits O2, and a fourth premix region (44, 98) from which exits a mixture of CH4 and O2. The burner provides more efficient utilization of halide-free, silicon-containing raw materials than prior burners.
대표청구항▼
A method of forming a silicon dioxide containing preform comprising the steps of: (a) providing an elongated starting member; (b) providing a soot-producing burner having a burner face that comprises first, second, third, and fourth gas-emitting regions, the second region surrounding the first regio
A method of forming a silicon dioxide containing preform comprising the steps of: (a) providing an elongated starting member; (b) providing a soot-producing burner having a burner face that comprises first, second, third, and fourth gas-emitting regions, the second region surrounding the first region, the third region surrounding the second region, and the fourth region surrounding the third region; (c) providing a mixture comprising oxygen and a halide-free, silicon-containing material to the first region; (d) providing an inert gas to the second region in an amount sufficient to inhibit soot from contacting the burner\s face; (e) providing oxygen to the third region; (f) providing a mixture comprising oxygen and a combustible gas to the fourth region; and (g) depositing silicon dioxide containing soot on the starting member to form the preform by producing relative motion between the soot-producing burner and the starting member.
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