초록 ▼

A two-dimensional optoelectronic array module contains metal, semiconductor metal, or P-I-N photodetectors which detect light, and converts it to electrical signals provided to conventional integrated circuitry contained on the same wafer. The circuitry processes the electrical signals, and drives a

A two-dimensional optoelectronic array module contains metal, semiconductor metal, or P-I-N photodetectors which detect light, and converts it to electrical signals provided to conventional integrated circuitry contained on the same wafer. The circuitry processes the electrical signals, and drives an array of vertical cavity lasers on another wafer through solder bumps which carry driver signals and connect the two wafers together. The detectors are thin membranes formed by etching intrinsic silicon wafers, and have anti-reflective coatings and Schottky metal contacts. The module is cooled via microchannels.

대표청구항 ▼

Apparatus for detecting input light and for generating an output as a function of the detection of said input light, comprising: a semiconductor wafer having a membrane formed therein in such a manner that said wafer surrounds and physically supports said membrane; said membrane having a first rough

Apparatus for detecting input light and for generating an output as a function of the detection of said input light, comprising: a semiconductor wafer having a membrane formed therein in such a manner that said wafer surrounds and physically supports said membrane; said membrane having a first roughened surface for receiving said input light, and having a second surface that is opposite said first surface; said membrane having a thickness extending between said first and second surfaces that is on the order of an absorption length of said input light or less; said roughened surface operating to cause said input light to reflect internally within said thickness of said membrane; and said membrane operating to internally release free carriers within said thickness of said membrane in response to the presence of said input light; a source of membrane biasing voltage; at least a first and a second electrical contact pair attached to physically spaced portions of said second side of said membrane; first circuit means including an impedance connecting said at least first and second electrical contact pair to said source of biasing voltage, said first circuit means for voltage biasing said membrane and for generate a current flow through said impedance that is proportional to said released free carriers; integrated circuit means fabricated on said wafer; and second circuit means connecting said integrated circuit means to be controlled by said current flow through said impedance, said integrated circuit means operating to provide said output as a function current flow through said impedance.