초록 ▼

A non-venting hazardous material liquid dispensing system (25) includes a removable supply vessel (7) coupled to a gas source (1) and a permanent buffer vessel (11). The permanent buffer vessel (11) is additionally coupled through a suction pump (14) to the removable supply vessel (7). The suction p

A non-venting hazardous material liquid dispensing system (25) includes a removable supply vessel (7) coupled to a gas source (1) and a permanent buffer vessel (11). The permanent buffer vessel (11) is additionally coupled through a suction pump (14) to the removable supply vessel (7). The suction pump (14) suctions pressure off the permanent supply vessel (11), transferring the pressure to removable supply vessel (7). The transfer of pressure causes hazardous material liquid (34) to be drawn from the removable supply vessel (7) into permanent buffer vessel (11). The permanent buffer vessel (11) dispenses hazardous material liquid (34) to a process tool.

대표청구항 ▼

A hazardous material liquid dispensing system dispensing a hazardous material liquid, the system comprising: a first vessel having a first vessel gas input and a first vessel liquid output; a second vessel having a second vessel liquid input coupled to the first vessel liquid output, the second vess

A hazardous material liquid dispensing system dispensing a hazardous material liquid, the system comprising: a first vessel having a first vessel gas input and a first vessel liquid output; a second vessel having a second vessel liquid input coupled to the first vessel liquid output, the second vessel further including a liquid output; a gas source for supplying gas to the system; a vessel coupling line coupling the second vessel to the first vessel, wherein suction is applied to the second vessel via the vessel coupling line, thereby drawing the hazardous material liquid into the second vessel through the second vessel liquid input; a regulator having a regulator input and a regulator output, the regulator output coupled to the vessel coupling line; and said gas source coupled to the regulator input.