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Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-029/04
출원번호 US-0170770 (1993-12-21)
발명자 / 주소
  • Baldwin David A. (Annandale VA) Michel Stephen L. (Alexandria VA)
출원인 / 주소
  • Commonwealth Scientific Corporation (Alexandria VA 02)
인용정보 피인용 횟수 : 59  인용 특허 : 8

초록 ▼

A process for depositing amorphous or nanophase diamondlike carbon (DLC) and a-C:H carbon/hydrogen films with variable and controllable properties on the surface of a substrate is disclosed. The process utilizes a combined hydrocarbon ion beam and plasma-activated hydrocarbon gaseous radical flux pr

대표청구항 ▼

A process for depositing a carbon containing film, such as, amorphous carbon (a-C), amorphous hydrogenated carbon (a-C:H), or, diamondlike carbon (DLC) film on a substrate using an end-Hall ion source, comprising the steps of: a. providing an end-Hall ion source in a vacuum chamber; b. providing a s

이 특허에 인용된 특허 (8)

  1. Kimock Fred M. (Macungie PA) Knapp Bradley J. (Allentown PA) Finke Steven J. (Kutztown PA), Abrasion wear resistant coated substrate product.
    상세보기
  2. Kimock Fred M. (Macungie) Knapp Bradley J. (Allentown) Finke Steven J. (Kutztown PA), Abrasion wear resistant polymeric substrate product.
    상세보기
  3. Banks Bruce A. (Olmsted Township ; Cuyahoga County OH), Apparatus for producing diamondlike carbon flakes.
    상세보기
  4. Little Roger G. (Bedford MA) Shanfield Stanley R. (West Newton MA), Coating method.
    상세보기
  5. Mirtich Michael J. (North Olmsted OH) Sovey James S. (Strongsville OH) Banks Bruce A. (Olmsted Township ; Cuyahoga County OH), Deposition of diamondlike carbon films.
    상세보기
  6. Kaufman Harold R. (925 Columbia ; Apt. 622 Fort Collins CO 80525) Robinson Raymond S. (2612 Bradbury Ct. Fort Collins CO 80521), End-Hall ion source.
    상세보기
  7. Aisenberg Sol (Natick MA), Film deposition.
    상세보기
  8. Lewin Gerhard (West Orange NJ) Nir Dan (Haifa ILX), Method of depositing a carbon film on a substrate and products obtained thereby.
    상세보기

이 특허를 인용한 특허 (59)

  1. Goncalves Neto,Luiz; Mansano,Ronaldo D.; Cirino,Giuseppe A.; Zambom,Luiz S.; Verdonck,Patrick B., Amorphous hydrogenated carbon film.
    상세보기
  2. Adib, Kaveh; Bellman, Robert Alan; Bookbinder, Dana Craig; Chang, Theresa; Liu, Shiwen; Manley, Robert George; Mazumder, Prantik, Articles and methods for controlled bonding of thin sheets with carriers.
    상세보기
  3. Campi, Jim G.; Van Den Broeke, Douglas J., Binary and phase-shift photomasks.
    상세보기
  4. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method.
    상세보기
  5. Veerasamy, Vijayen S., Coated article with DLC inclusive layer(s) having increased hydrogen content at surface area.
    상세보기
  6. Harker, Mallorie; Liddiard, Steven D.; Abbott, Jonathan; Davis, Robert; Vanfleet, Richard; Pei, Lei, Corrosion-resistant, strong x-ray window.
    상세보기
  7. Kirkpatrick, Sean R., Diamond-like carbon film with enhanced adhesion.
    상세보기
  8. Cox Isaiah W.,GBX, Doped diamond for vacuum diode heat pumps and vacuum diode thermionic generators.
    상세보기
  9. Cox Isaiah Watas,GBX, Doped diamond for vacuum diode heat pumps and vacuum diode thermionic generators.
    상세보기
  10. Han Hua ; Linden Kelly D. ; Ryan Francis W. ; Boman Lee C., Durable landing pads for an air-bearing slider.
    상세보기
  11. Mearini Gerald T., Electron beam evaporation of transparent indium tin oxide.
    상세보기
  12. Bellman, Robert Alan; Bookbinder, Dana Craig; Manley, Robert George; Mazumder, Prantik, Facilitated processing for controlling bonding between sheet and carrier.
    상세보기
  13. Bellman, Robert Alan; Bookbinder, Dana Craig; Manley, Robert George; Mazumder, Prantik; Chang, Theresa; Domey, Jeffrey John; Enicks, Darwin Gene; Ravichandran, Vasudha; Stephens, II, Alan Thomas; Thomas, John Christopher, Glass articles and methods for controlled bonding of glass sheets with carriers.
    상세보기
  14. Davis, Robert C.; Vanfleet, Richard; Zufeldt, Kyle; Davis, Andrew L.; Liddiard, Steven D., High strength carbon fiber composite wafers for microfabrication.
    상세보기
  15. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
    상세보기
  16. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
    상세보기
  17. Veerasamy, Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
    상세보기
  18. Veerasamy, Vijayen; Weiler, Manfred; Li, Eric, Highly tetrahedral amorphous carbon coatings and systems and methods for their production.
    상세보기
  19. Veerasamy,Vijayen; Weiler,Manfred; Li,Eric, Highly tetrahedral amorphous carbon coatings and systems and methods for their production.
    상세보기
  20. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Hydrophobic coating including DLC and/or FAS on substrate.
    상세보기
  21. Veerasamy Vijayen S., Hydrophobic coating including DLC on substrate.
    상세보기
  22. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
    상세보기
  23. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
    상세보기
  24. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo, Hydrophobic coating with DLC & FAS on substrate.
    상세보기
  25. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Low-E coating system including protective DLC.
    상세보기
  26. Ishiyama, Masafumi; Ayama, Kenji, Magnetic disk, method of manufacturing the magnetic disk and method of evaluating the magnetic disk.
    상세보기
  27. Ishiyama, Masafumi; Ayama, Kenji, Magnetic disk, method of manufacturing the magnetic disk and method of evaluating the magnetic disk.
    상세보기
  28. Mahoney, Leonard Joseph; Brown, David Ward; Petrmichl, Rudolph Hugo, Method and apparatus for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source.
    상세보기
  29. Michael S. Amann ; Michael Kishinevsky ; Andrew Shabalin ; Colin Quinn, Method for deposition of diamond like carbon.
    상세보기
  30. Mahoney Leonard Joseph ; Brown David Ward ; Petrmichl Rudolph Hugo, Method for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source.
    상세보기
  31. Hsiao, Yiping; Hwang, Cherngye; Fox, Ciaran A.; Hsiao, Richard, Method for forming the air bearing surface of a slider using nonreactive plasma.
    상세보기
  32. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of depositing DLC inclusive coating on substrate.
    상세보기
  33. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of deposition DLC inclusive layer(s) using hydrocarbon and/or siloxane gas(es).
    상세보기
  34. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of ion beam milling a glass substrate prior to depositing a coating system thereon, and corresponding system for carrying out the same.
    상세보기
  35. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon.
    상세보기
  36. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of making a coated article including DLC and FAS.
    상세보기
  37. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Method of making coated article including DLC inclusive layer over low-E coating.
    상세보기
  38. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of making coated article including diamond-like carbon (DLC) and FAS.
    상세보기
  39. Veerasamy, Vijayen S., Method of making coated article including layer(s) of diamond-like carbon which may be hydrophobic.
    상세보기
  40. Veerasamy, Vijayen S., Method of making coating article including carbon coating on glass.
    상세보기
  41. Veerasamy,Vijayen S., Method of making heat treatable coated article with diamond-like carbon (DLC) inclusive layer.
    상세보기
  42. Veerasamy, Vijayen S., Method of making heat treatable coated article with protective layer.
    상세보기
  43. Vijayen S. Veerasamy, Method of making hydrophobic coated article.
    상세보기
  44. Vijayen, Veerasamy; Weiler, Manfred; Li, Eric, Method of producing recording media having protective overcoats of highly tetrahedral amorphous carbon.
    상세보기
  45. Amann, Michael S.; Kishinevsky, Michael; Shabalin, Andrew; Quinn, Colin, Method of providing a material processing ion beam.
    상세보기
  46. Bellman, Robert Alan; Bookbinder, Dana Craig; Manley, Robert George; Mazumder, Prantik; Chang, Theresa; Domey, Jeffrey John; Enicks, Darwin Gene; Ravichandran, Vasudha; Stephens, II, Alan Thomas; Thomas, John Christopher, Methods for processing electronic devices.
    상세보기
  47. Kaufman, Harold R., Modular gridless ion source.
    상세보기
  48. Ma, Xiaoding; Grannen, Kevin J.; Gui, Jing; McCann, Jeffrey A.; Shows, Mark A., Nitrogen-doped hydrogenated carbon films by ion beam deposition.
    상세보기
  49. Terry Bluck ; James H. Rogers, Plasma processing system and method.
    상세보기
  50. Vijayen S. Veerasamy, Process for depositing DLC inclusive coating with surface roughness on substrate.
    상세보기
  51. Veerasamy, Vijayen; Weiler, Manfred; Li, Eric, Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production.
    상세보기
  52. Veerasamy, Vijayen; Weiler, Manfred; Li, Eric, Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production.
    상세보기
  53. Vijayen, Veerasamy; Weiler, Manfred; Li, Eric, Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production.
    상세보기
  54. Vijayen, Veerasamy; Weiler, Manfred; Li, Eric, Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production.
    상세보기
  55. Liddiard, Steven D.; Jensen, Charles R.; Zappe, Michael; Decker, Keith W.; Davis, Robert C.; Pei, Lei; Vanfleet, Richard R., Reinforced polymer x-ray window.
    상세보기
  56. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Solar management coating system including protective DLC.
    상세보기
  57. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Solar management coating system including protective DLC.
    상세보기
  58. Vijayen, Veerasamy; Weiler, Manfred; Li, Eric, Systems and methods for the production of highly tetrahedral amorphous carbon coatings.
    상세보기
  59. Ma,Xiaoding; Grannen,Kevin J.; Gui,Jing; McCann,Jeffrey A.; Shows,Mark A., Thin-film magnetic recording media with dual intermediate layer structure for increased coercivity.
    상세보기

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