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Method for coating a substrate with diamond film 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/26
  • C23C-016/44
출원번호 US-0574750 (1995-12-19)
발명자 / 주소
  • Simpson Matthew A. (Sudbury MA)
출원인 / 주소
  • Saint Gobain/Norton Industrial Ceramics Corp. (Worcester MA 02)
인용정보 피인용 횟수 : 32  인용 특허 : 21

초록 ▼

A method for depositing synthetic diamond film on a substrate, including the following steps: pre-stressing the substrate to obtain a pre-deposition stress across a surface thereof; depositing the diamond film on the pre-stressed substrate surface; and cooling the film and substrate, and relieving t

대표청구항 ▼

A method for depositing synthetic diamond film on a substrate, the substrate material having a coefficient of thermal expansion that is different than the coefficient of thermal expansion of the diamond film, comprising the steps of: pre-stressing said substrate to obtain a pre-deposition compressiv

이 특허에 인용된 특허 (21)

  1. Schrantz Gregory A. (Melbourne FL) Linn Jack H. (Melbourne FL) Belcher Richard W. (Melbourne FL), Bonded wafer process incorporating diamond insulator.
    상세보기
  2. Purdes Andrew J. (Garland TX), Diamond growth method.
    상세보기
  3. Chen Sy-Hwa (Columbia SC) Hansen Jeffrey S. (Salt Lake City UT), Diamond having multiple coatings and methods for their manufacture.
    상세보기
  4. Ikegaya Akihiko (Itami JPX) Tobioka Masaaki (Itami JPX), Gaseous phase synthesized diamond and method for synthesizing same.
    상세보기
  5. Garg Diwakar (Macungie PA) Lynn Sui-Yuan (Macungie PA) Iampietro Robert L. (Emmaus PA) Wrecsics Ernest L. (Bethlehem PA) Dyer Paul N. (Allentown PA), Interrupted method for producing multilayered polycrystalline diamond films.
    상세보기
  6. Cann Gordon L. (P.O. Box 279 Laguna Beach CA 92652), Magnetoplasmadynamic apparatus and process for the separation and deposition of materials.
    상세보기
  7. Cann Gordon L. (P.O. Box 279 Laguna Beach CA 92652), Magnetoplasmadynamic apparatus for the separation and deposition of materials.
    상세보기
  8. Kawarada Motonobu (Sagamihara JPX) Kurihara Kazuaki (Atsugi JPX) Sasaki Ken-ichi (Atsugi JPX) Teshima Akitomo (Isehara JPX) Koshino Nagaaki (Yokohama JPX), Method for forming diamond films by plasma jet CVD.
    상세보기
  9. Schachner Herbert (Grand-Lancy CHX) Tippmann Heinz (Le Lignon CHX) Lux Benno (Scuol/Gr CHX) Stjernberg Klas G. (Huddinge SEX) Thelin Anders G. (Vllingby SEX), Method for making a composite body coated with one or more layers of inorganic materials including CVD diamond.
    상세보기
  10. Simpson Matthew (Arlington MA) Frey Robert M. (Worcester MA), Method for making free-standing diamond film.
    상세보기
  11. Cann Gordon L. (Laguna Beach) Shephard ; Jr. Cecil B. (Laguna Beach) McKevitt Frank X. (Anaheim Hills CA), Method for plasma deposition on apertured substrates.
    상세보기
  12. Slutz David E. (Columbus OH) Knemeyer Friedel S. (Granville OH), Method for producing CVD diamond film substantially free of thermal stress-induced cracks.
    상세보기
  13. Knemeyer Friedel S. (Granville OH) Slutz David E. (Columbus OH), Method for producing flat CVD diamond film.
    상세보기
  14. Bigelow Louis K. (Salt Lake City UT), Method for producing synthetic diamond structures.
    상세보기
  15. Iguchi Takahisa (Hyogo JPX) Nakamura Tsutomu (Hyogo JPX) Nakai Tetsuo (Hyogo JPX), Method of manufacturing a diamond heat sink.
    상세보기
  16. Jones Barbara L. (80 Chisbury Place ; Forest Park Bracknell ; RG12 3TX GB2), Method of producing a thin carbide layer on a carbon substrate, growing a diamond or diamond-like film on the carbide la.
    상세보기
  17. Drawl William R. (State College PA) McCune Robert C. (Birmingham MI), Method of toughening diamond coated tools.
    상세보기
  18. Tanabe Keiichiro (Hyogo JPX) Fujimori Naoji (Hyogo JPX), Polycrystalline diamond tool and method for producing the polycrystalline diamond tool.
    상세보기
  19. Sakamoto Masakatu (Hachiohji JPX) Yaguchi Youichi (Tokyo JPX) Toshima Hiroaki (Ibaragi JPX) Kotaki Toshiroh (Tokyo JPX), Process for forming a crystalline diamond film.
    상세보기
  20. Ravi Kramadhati V. (Atherton CA), Silicon on insulator semiconductor composition containing thin synthetic diamone films.
    상세보기
  21. Anthony Thomas R. (Schenectady NY) Fleischer James F. (Scotia NY), Transparent diamond films and method for making.
    상세보기

이 특허를 인용한 특허 (32)

  1. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method.
    상세보기
  2. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S.; Thomas, Kurt, Faucet.
    상세보기
  3. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
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  4. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
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  5. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
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  6. Brondum, Klaus, Faucet with wear-resistant valve component.
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  7. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
    상세보기
  8. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
    상세보기
  9. Veerasamy, Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
    상세보기
  10. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Hydrophobic coating including DLC and/or FAS on substrate.
    상세보기
  11. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
    상세보기
  12. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo, Hydrophobic coating with DLC & FAS on substrate.
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  13. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Low-E coating system including protective DLC.
    상세보기
  14. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of depositing DLC inclusive coating on substrate.
    상세보기
  15. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of deposition DLC inclusive layer(s) using hydrocarbon and/or siloxane gas(es).
    상세보기
  16. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of ion beam milling a glass substrate prior to depositing a coating system thereon, and corresponding system for carrying out the same.
    상세보기
  17. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon.
    상세보기
  18. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of making a coated article including DLC and FAS.
    상세보기
  19. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Method of making coated article including DLC inclusive layer over low-E coating.
    상세보기
  20. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of making coated article including diamond-like carbon (DLC) and FAS.
    상세보기
  21. Veerasamy, Vijayen S., Method of making coated article including layer(s) of diamond-like carbon which may be hydrophobic.
    상세보기
  22. Veerasamy, Vijayen S., Method of making coating article including carbon coating on glass.
    상세보기
  23. Veerasamy,Vijayen S., Method of making heat treatable coated article with diamond-like carbon (DLC) inclusive layer.
    상세보기
  24. Veerasamy, Vijayen S., Method of making heat treatable coated article with protective layer.
    상세보기
  25. Lev, Leonid C.; Carter, Jon T.; Cheng, Yang T.; Ang, Carolina C., Methods for forming articles having apertures and articles having substantially reduced residual compressive stress.
    상세보기
  26. Ravi, Kramadhati V., Methods for the control of flatness and electron mobility of diamond coated silicon and structures formed thereby.
    상세보기
  27. Kuroda, Masayuki; Ishida, Hidetoshi; Ueda, Tetsuzo, Semiconductor device and manufacturing method thereof.
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  28. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Solar management coating system including protective DLC.
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  29. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Solar management coating system including protective DLC.
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  30. Mollart, Timothy; Jiang, Quanzhong; Edwards, Michael John; Allsopp, Duncan; Bowen, Christopher Rhys; Wang, Wang Nang, Substrates for semiconductor devices.
    상세보기
  31. Brondum, Klaus; Welty, Richard P.; Richmond, Douglas S.; Jonte, Patrick B.; Thomas, Kurt, Valve component for faucet.
    상세보기
  32. Brondum, Klaus; Welty, Richard P.; Richmond, Douglas S.; Jonte, Patrick B.; Thomas, Kurt, Valve component for faucet.
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