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Sealed parts leak testing method and apparatus for helium spectrometer leak detection

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01M-003/20
출원번호 US-0084003 (1993-06-29)
발명자 / 주소
  • Mahoney David G. (Londonderry NH) Ruiz Glenn E. (Billerica MA) Farmer Jack W. (Sierra Madre CA) Pflanz Thomas L. (Westwood MA) Hall William D. (Deerfield NH) Parsons
  • deceased Roy F. (late of Dunsta
출원인 / 주소
  • Varian Associates, Inc. (Palo Alto CA 02)
인용정보 피인용 횟수 : 20  인용 특허 : 10

초록

Small, hermetically sealed pans are leak tested after subjecting the finished device to an environment of trace gas such as helium. During the testing process the pans may lose their helium charge by rapid escape due to massive gross leaks. These cases demand pre-helium mass spectrometer leak detect

대표청구항

An improved trace gas leak detection apparatus for testing small hermetically sealed parts approximating the size of devices such as impact sensors in which a test fixture for sealable enclosure of the parts is coupled through a test valve to a foreline of a high vacuum pump, the high vacuum pump is

이 특허에 인용된 특허 (10)

  1. Johnson Kenneth A. (Walworth NY) Ellis ; Jr. Charles E. (Phelps NY), Apparatus and method for measuring pressure changes within pressure vessels.
  2. Morel Jacques (Annecy FRX) Tallon Jacques (Annecy FRX), Apparatus for measuring and displaying leakage rates in a tracer gas leakage detector.
  3. Fruzzetti Paul R. (N. Easton MA) Leavitt Philip J. (Billerica MA) Nuzzi Frank J. (Methuen MA), Counterflow leak detector with cold trap.
  4. Landfors Arthur A. (Brookline MA), Counterflow leak detector with high and low sensitivity operating modes.
  5. Handke Klaus (Wertheim DEX) Brger Heinz D. (Wertheim DEX) Braunschweig Falk (Wertheim DEX), Device and a method for detecting leaks.
  6. Burns William (Rochester Hills MI), Leak testing apparatus and method.
  7. Mennenga Hermann (Balzers Frstentum LIX), Low pressure leak detector.
  8. Fruzzetti Paul R. (N. Easton MA), Method and apparatus for gross leak detection.
  9. Lehmann Martin (Obere Farnbhlstrasse 1 5610 Wohlen CHX), Method and apparatus for leak testing a hollow body.
  10. Lehmann Martin (Obere Farnbhlstrasse 1 5610 Wohlen CHX), Process and apparatus for volume-testing a hollow body.

이 특허를 인용한 특허 (20)

  1. William Allen Arnold ; John Morris Chapman LU, Accelerated leakage testing.
  2. David F. McGrath, Bellows seal with laterally offset adjusted liner.
  3. Pan, Yung-Tai; Tsai, Jung-Lang, Close-type speaker leak test system and method.
  4. Coffman John Daniel ; Lorge Jeffrey Gordon, Dual mode leak detector.
  5. Geist,J. Daniel; Diep,Jeffrey; Williams,Peter; Perkins,Charles W., High sensitivity slitless ion source mass spectrometer for trace gas leak detection.
  6. Muller, Stuart; Torres, Jr., Robert, Leak characterization apparatuses and methods for fluid storage containers.
  7. Walter, Gerhard Wilhelm; Holstein, Guenter; Beyer, Christian, Leak detection device and method for checking objects for fluid tightness by means of a leak detection device.
  8. Geist,J. Daniel; Diep,Jeffrey; Williams,Peter; Perkins,Charles W., Mass spectrometer for trace gas leak detection with suppression of undesired ions.
  9. Seigeot Bertrand,FRX, Method and apparatus for detecting leaks in heat exchangers for motor vehicles.
  10. Perkins,Charles; Palenstijn,Pieter N., Method and apparatus for large leak testing.
  11. Flosbach Rudolf,DEX ; Klein Joachim,DEX ; Nothhelfer Markus,DEX, Method and apparatus for recovering helium after testing for leaks in a sample holder.
  12. Martin Messmann DE, Method and apparatus for testing hollow pieces for impermeability.
  13. Meyer,Robert A.; Meyer,James Isaac, Method for determining vacuum producer system parameters and performance specifications.
  14. Wang, Genglin; Li, Fei; Wang, Caiyi; Li, Ningbo; Wang, Liyan; Dong, Lijun; Liu, Yongmin, Method for helium mass spectrometric fine-leak test based on quantitative determination of maximum test-waiting time.
  15. Thomas Bohm DE; Rudi Widt DE, Method for operating helium leak indicator and the application of this method to helium leak indicators.
  16. Perkins,Charles; Palenstijn,Pieter N., Methods and apparatus for detection of large leaks in sealed articles.
  17. McGrath David F., Pipeline leak monitoring system.
  18. Menge, Peter R.; Kusner, Michael, Scintillation detector and method of assembling and testing.
  19. Platt, Ian Thomas; Ruck, Timothy Charles; Khan, Almas; Porter, Christopher John, Techniques for automated performance maintenance testing and reporting for analytical instruments.
  20. Baret Gilles,FRX ; Gevaud Roland,FRX ; Devance Alain,FRX, Tracer gas leak detector.
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