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Process and apparatus for treating inner surface treatment of chamber and vacuum chamber 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B08B-009/00
출원번호 US-0405768 (1995-03-17)
우선권정보 JP-0047061 (1994-03-17)
발명자 / 주소
  • Kobari Toshiaki (Ibaraki-ken JPX) Hirano Nobuo (Ibaraki-ken JPX) Matsumoto Manabu (Ibaraki-ken JPX) Katane Mamoru (Hitachi JPX) Sakurabata Hiroaki (Hitachi JPX) Matsuzaki Shiro (Hitachi JPX)
출원인 / 주소
  • Hitachi, Ltd. (JPX 03)
인용정보 피인용 횟수 : 100  인용 특허 : 0

초록 ▼

A rod driver is used to drive a rod so as to move a broach through a continuous vacuum chamber in the axial direction. The broach is provided at the leading end of the rod with cutting and finishing edges at a plurality of stages in the axial direction. The cutting edges each have chip breakers in t

대표청구항 ▼

A process for treating an inner surface of a vacuum chamber comprising the steps of contacting at least one cutting edge of a broach with the inner surface, cutting off a contaminated layer on the inner surface with cutouts in an outer periphery of the broach with relative movement in an axial direc

이 특허를 인용한 특허 (100)

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